Patents by Inventor Ami Chand
Ami Chand has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170184631Abstract: Specific probe device configurations and processes for producing those probe configurations. A Probe device may include a silicon nitride cantilever of controlled thickness, holding a silicon probe tip of controllable sharpness. The probe tip may also be coated with a silicon nitride layer also of controllable thickness. An optional silicon reflective pad may also be formed as a base for the tip. The probe device is produced by forming a tip, optionally with base pad, on a silicon wafer, depositing a silicon nitride film on the wafer, etching the silicon nitride film to form a cantilever holding the tip/pad, selectively etching the silicon nitride film for separately controllable thickness both for the cantilever and the coated tip, and then etching away the backside silicon to leave a free silicon nitride cantilever holding a silicon nitride coated tip.Type: ApplicationFiled: December 14, 2016Publication date: June 29, 2017Inventors: Ami Chand, Jeremy Goeckeritz
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Patent number: 9389244Abstract: A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.Type: GrantFiled: May 6, 2014Date of Patent: July 12, 2016Assignee: Applied Nanostructures, Inc.Inventors: Jeremy J. Goeckeritz, Gary D. Aden, Ami Chand, Josiah F. Willard
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Publication number: 20140338075Abstract: A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.Type: ApplicationFiled: May 6, 2014Publication date: November 13, 2014Applicant: APPLIED NANOSTRUCTURES, INC.Inventors: Jeremy J. Goeckeritz, Gary D. Aden, Ami Chand, Josiah F. Willard
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Patent number: 8857247Abstract: A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.Type: GrantFiled: May 19, 2008Date of Patent: October 14, 2014Assignee: Bruker Nano, Inc.Inventors: Kevin J. Kjoller, Ami Chand, Nihat Okulan
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Patent number: 8828243Abstract: A cantilever-tip assembly for atomic force microscopy (AFM) or other scanning probe microscopy and its method of making based on micro-electromechanical systems (MEMS). Two crystalline silicon wafers and attached oxide and nitride layers are bonded together across an intermediate dielectric layer. A thin cantilever with a tetrahedral silicon probe tip at its distal end are formed in one wafer by anisotropic etching of silicon and a support structure is formed in the other wafer to support the proximal end of the cantilever preferably having an inclined face formed by anisotropic silicon etching. The cantilever may be silicon or silicon nitride.Type: GrantFiled: September 2, 2010Date of Patent: September 9, 2014Assignee: Applied Nanostructures, Inc.Inventors: Rakesh Poddar, Ami Chand
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Patent number: 8397555Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.Type: GrantFiled: February 28, 2011Date of Patent: March 19, 2013Assignee: Applied NanoStructures, Inc.Inventor: Ami Chand
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Publication number: 20120060244Abstract: A cantilever-tip assembly for atomic force microscopy (AFM) or other scanning probe microscopy and its method of making based on micro-electromechanical systems (MEMS). Two crystalline silicon wafers and attached oxide and nitride layers are bonded together across an intermediate dielectric layer. A thin cantilever with a tetrahedral silicon probe tip at its distal end are formed in one wafer by anisotropic etching of silicon and a support structure is formed in the other wafer to support the proximal end of the cantilever preferably having an inclined face formed by anisotropic silicon etching. The cantilever may be silicon or silicon nitride.Type: ApplicationFiled: September 2, 2010Publication date: March 8, 2012Applicant: APPLIED NANOSTRUCTURES, INC.Inventors: Rakesh Poddar, Ami Chand
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Patent number: 8003534Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.Type: GrantFiled: December 28, 2010Date of Patent: August 23, 2011Assignee: Applied Nanostructures, Inc.Inventor: Ami Chand
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Publication number: 20110092046Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.Type: ApplicationFiled: December 28, 2010Publication date: April 21, 2011Applicant: APPLIED NANOSTRUCTURES, INC.Inventor: Ami Chand
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Patent number: 7913544Abstract: The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.Type: GrantFiled: November 15, 2007Date of Patent: March 29, 2011Assignee: Applied NanoStructures, Inc.Inventor: Ami Chand
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Patent number: 7884445Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.Type: GrantFiled: November 22, 2006Date of Patent: February 8, 2011Assignee: Applied Nanostructures, Inc.Inventor: Ami Chand
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Publication number: 20080282819Abstract: A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length that is independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.Type: ApplicationFiled: May 19, 2008Publication date: November 20, 2008Inventors: Kevin J. Kjoller, Ami Chand, Nihat Okulan
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Publication number: 20080116533Abstract: An apparatus and method for holding a semiconductor device in a wafer. A bar is connected to the wafer. A first sidewall comprises a first end and a second, and is connected to the bar at its first end. A first tab comprises a first end and a second end, and is connected to the second end of the first sidewall at its first end and connected to the first side of the semiconductor device at its second end. The thickness of the first tab is less than the thickness of the bar and the thickness of the first sidewall.Type: ApplicationFiled: November 22, 2006Publication date: May 22, 2008Applicant: Applied NanoStructures, Inc.Inventor: Ami Chand
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Patent number: 7370515Abstract: Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.Type: GrantFiled: June 21, 2004Date of Patent: May 13, 2008Assignee: Veeco Instruments Inc.Inventors: Nihat Okulan, Ami Chand
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Patent number: 7334460Abstract: A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.Type: GrantFiled: May 9, 2006Date of Patent: February 26, 2008Assignee: Veeco Instruments, Inc.Inventors: Ami Chand, Kevin J. Kjoller, Kenneth L. Babcock, Michael K. Harris
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Publication number: 20080011058Abstract: This invention provides a sensor to measure physical and/or chemical properties of viscous fluids. The sensor is based on microfabricated piezoresistive cantilevers. Deflection of these cantilevers is read out using, e.g., a wheatstone bridge to amplify and convert the deflection into a voltage output. The cantilevers and/or tips attached thereto, can be chemically or physically modified using reagents specific to interact with analytes to be detected in the fluid. The cantilevers can be integrated in a microfluidic system for easy fluid handling and the ability to manage small quantities of fluids.Type: ApplicationFiled: March 19, 2007Publication date: January 17, 2008Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventors: Ratnesh Lal, Ami Chand, Arjan Quist, Dan Cohen
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Patent number: 7210330Abstract: A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.Type: GrantFiled: August 24, 2006Date of Patent: May 1, 2007Assignee: Veeco Instruments, Inc.Inventors: Ami Chand, Nihat Okulan
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Publication number: 20060277972Abstract: A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.Type: ApplicationFiled: August 24, 2006Publication date: December 14, 2006Applicant: VEECO INSTRUMENTS INC.Inventors: Ami Chand, Nihat Okulan
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Publication number: 20060243034Abstract: A method and apparatus for manipulating the surface of a sample including a cantilever, a first tip mounted on the cantilever, and a second tip mounted on the cantilever, the first and the second tip being configured to combine to form an imaging probe and to separate to form a manipulation probe. The first and second tips are configured to form a first position characterized in that the tips combine to form an imaging tip and the first and the second tip are configured to form a second position characterized in that the tips separate to manipulate particles on a surface of a sample. The tips can be configured to form the first position when a voltage is applied across the tips, and preferable extend downwardly from the cantilever substantially perpendicular thereto.Type: ApplicationFiled: May 9, 2006Publication date: November 2, 2006Inventors: Ami Chand, Kevin Kjoller, Kenneth Babcock, Michael Harris
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Publication number: 20060213289Abstract: A probe assembly for an instrument and a method of manufacture includes a substrate and a cantilever having a length independent of typical alignment error during fabrication. In one embodiment, the probe assembly includes a buffer section interposed between the substrate and the cantilever. The cantilever extends from the buffer section and a portion of the buffer section extends beyond an edge of the substrate. The portion of the buffer section is more stiff than the cantilever. The corresponding method of producing the probe assembly facilitates batch fabrication without compromising probe performance.Type: ApplicationFiled: March 24, 2005Publication date: September 28, 2006Inventors: Kevin Kjoller, Ami Chand, Nihat Okulan