Abstract: In one aspect, a microelectromechanical device and method of producing the device includes an accelerometer with a thinned flexure structure. In another embodiment, the device and method of producing the device includes an accelerometer and a pressure sensor integrated on a single chip.

Abstract: Methods of manufacturing a MEMS assembly having a shutter or mirror driven by an actuator. The MEMS assembly can be formed by grooving a substrate, forming a displaceable member and electrode actuators on the substrate, and joining to a supporting base. Alternatively, the mirror core and the electrode actuators can be formed on separate substrates and thereafter be joined. A MEMS actuator which moves the member in a direction perpendicular to the MEMS actuator's own plane has interlaced internal ridges. When voltage is applied to the ridges, the actuator's upper and lower substrates move together.

Abstract: An apparatus for detecting the position of an optical element includes an actuator coupled to the optical element. A sensor coupled to the optical element senses the movement of the optical element. The sensor includes a moveable electrode coupled to the optical element for outputting a position detection signal.

Abstract: A process for forming a sensor (10) such as an accelerometer includes the steps of forming an epitaxial layer (14) on a semiconductor substrate (12), patterning a portion of the epitaxial layer to provide a monocrystalline finger (20,22), wherein the finger has a height (43) at least twice its width (44), and forming a cavity (40) under at least a portion of the finger to expose a bottom surface (38) of the finger using an etchant with an etch selectivity for the semiconductor substrate relative to the epitaxial layer of greater than about 10:1. The distance (42) from the bottom of the cavity to the bottom surface of the member is greater than about 5 microns. The accelerometer is useful for lateral acceleration sensing and is built in bulk silicon at the surface of the substrate.