Patents by Inventor Amir Shoham
Amir Shoham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230417683Abstract: An optical inspection system, including (a) an illumination optics that is configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; (b) at least one collection optics configured to collect light from the sample as a result of an impingement of the illumination light beam on the sample; (c) at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; (d) multiple polarizers that comprise at least one inhomogeneous polarizer and at least one half-wave plate; and (e) at least one movement unit that is configured to move, under a control of a control unit of the optical inspection system, the at least one inhomogeneous polarizer thereby impacting a polarization of one or more light beams out of the illumination light beam, and the at least one detected light beam.Type: ApplicationFiled: September 13, 2023Publication date: December 28, 2023Applicant: Applied Materials Israel Ltd.Inventors: Elad Eizner, Amir Shoham
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Patent number: 11796783Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.Type: GrantFiled: October 20, 2021Date of Patent: October 24, 2023Assignee: Applied Materials Israel Ltd.Inventors: Elad Eizner, Amir Shoham
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Publication number: 20230117345Abstract: An optical inspection system that may include an illumination optics configured to generate an illumination light beam and to illuminate a sample with the illumination light beam; at least one collection optics configured to collect light from the sample; at least one detector configured to detect at least one detected light beam outputted from the at least one collection optics; multiple polarizers that are configured to (a) set a polarization of the illumination light beam by selectively introducing, under a control of the control unit, at least one illumination optics polarization change, and (b) set a polarization of the at least one detected light beam by selectively introducing, under a control of the control unit, at least one collection optics polarization change. The multiple polarizers may include one or more illumination half-wave plates, one or more quarter-wave plates, and one or more inhomogeneous polarizers.Type: ApplicationFiled: October 20, 2021Publication date: April 20, 2023Applicant: Applied Materials Israel Ltd.Inventors: Elad Eizner, Amir Shoham
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Patent number: 11385188Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: August 19, 2019Date of Patent: July 12, 2022Assignee: APPLIED MATERIAL ISRAEL, LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Patent number: 11105740Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.Type: GrantFiled: October 22, 2019Date of Patent: August 31, 2021Assignee: Applied Materials Israel Ltd.Inventors: Amir Shoham, Binyamin Kirshner, David Goldovsky, Nitzan Chamiel
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Patent number: 11029253Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations.Type: GrantFiled: March 30, 2017Date of Patent: June 8, 2021Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Amir Shoham, Ido Dolev, Yariv Simovitch
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Publication number: 20210116368Abstract: Systems and methods for optical inspection of a sample are provided. Radiation scattered from the sample includes a first portion having a first polarization state and a second portion having a second polarization state that is a mirror image of the first polarization state. The first polarization state of the first portion of the scattered radiation is transposed using a polarizing mirroring device so that the scattered radiation output from the polarizing mirroring device has substantially the second polarization state.Type: ApplicationFiled: October 22, 2019Publication date: April 22, 2021Inventors: Amir Shoham, Binyamin Kirshner, David Goldovsky, Nitzan Chamiel
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Patent number: 10386311Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: November 5, 2017Date of Patent: August 20, 2019Assignee: APPLIED MATERIALS ISRAEL, LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Publication number: 20180284031Abstract: A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations.Type: ApplicationFiled: March 30, 2017Publication date: October 4, 2018Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Amir Shoham, Ido Dolev, Yariv Simovitch
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Patent number: 9810643Abstract: A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.Type: GrantFiled: September 25, 2013Date of Patent: November 7, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Amir Shoham, Yoav Berlatzky, Haim Feldman
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Patent number: 9470751Abstract: A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.Type: GrantFiled: January 13, 2014Date of Patent: October 18, 2016Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Amir Shoham, Alon Litman
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Patent number: 9354212Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.Type: GrantFiled: January 7, 2014Date of Patent: May 31, 2016Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Yoav Berlatzky, Amir Shoham, Ido Dolev
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Publication number: 20150198648Abstract: A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.Type: ApplicationFiled: January 13, 2014Publication date: July 16, 2015Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Amir Shoham, Alon Litman
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Publication number: 20150193926Abstract: A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals.Type: ApplicationFiled: January 7, 2014Publication date: July 9, 2015Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Yoav Berlatzky, Amir Shoham, Ido Dolev
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Patent number: 9012875Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.Type: GrantFiled: April 7, 2011Date of Patent: April 21, 2015Assignee: Applied Materials Israel, Ltd.Inventors: Amir Shoham, Haim Feldman, Doron Shoham
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Publication number: 20140299790Abstract: A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.Type: ApplicationFiled: April 7, 2011Publication date: October 9, 2014Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Amir Shoham, Haim Feldman, Doron Shoham
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Patent number: 8207499Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.Type: GrantFiled: September 24, 2008Date of Patent: June 26, 2012Assignee: Applied Materials Israel, Ltd.Inventors: Amir Shoham, Benzion Sender, Alon Litman
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Patent number: 7764426Abstract: An apparatus for providing a light beam with spatially varying polarization. The apparatus includes: two circumferentially curved reflectors positioned substantially opposite each other, a polarizer positioned in an optical path between the two reflectors, for polarizing light reflected from one reflector before it reaches the other. A non-polarized light beam incident along a given axis on one of the reflectors is radially reflected off that reflector, acquires predetermined polarization from the polarizer and is then reflected off the second reflector to a light beam of spatially varying polarization.Type: GrantFiled: April 4, 2004Date of Patent: July 27, 2010Assignee: Technion Research and Development Foundation Ltd.Inventors: Stephen Geoffrey Lipson, Amir Shoham
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Publication number: 20100072365Abstract: A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.Type: ApplicationFiled: September 24, 2008Publication date: March 25, 2010Inventors: Amir Shoham, Benzion Sender, Alon Litman
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Publication number: 20070183036Abstract: An apparatus for providing a light beam with spatially varying polarization. The apparatus comprises: two circumferentially curved reflectors positioned substantially opposite each other, a polarizer positioned in an optical path between the two reflectors, for polarizing light reflected from one reflector before it reaches the other. A non-polarized light beam incident along a given axis on one of the reflectors is radially reflected off that reflector, acquires predetermined polarization from the polarizer and is then reflected off the second reflector to a light beam of spatially varying polarization.Type: ApplicationFiled: April 4, 2004Publication date: August 9, 2007Inventors: Stephen Lipson, Amir Shoham