Abstract: Thermal bases for gas distribution assemblies, gas distribution assemblies incorporating the thermal bases, and process chambers incorporating the gas distribution assemblies are described. The thermal bases have an annular slit formed in the front surface of the thermal base. The annular slit forms a boundary between the inner portion and outer portion of the thermal base. Processing methods using the thermal base for temperature uniformity improvement are also described.

Abstract: Process kits for semiconductor manufacturing processing chambers and semiconductor manufacturing processing chambers using the process kits are described. The process kits include an edge ring with a lower annular ring portion having a plurality of annularly spaced edge ring fins extending upwardly from the top surface of the lower annular ring portion. A liner has an inwardly directed annular extension with annularly spaced liner fins extending downwardly from the bottom surface of the inwardly directed annular extension. The edge ring fins and liner fins interdigitate without contacting to form a tortuous flow path.

Abstract: Cooling flanges and semiconductor manufacturing processing chamber comprising the cooling flanges are disclosed. The cooling flanges comprise a flange body with a gas channel extending through the length thereof. The gas channel has an inlet funnel, a middle channel and an outlet funnel with a purge gas inlet in a side of the flange body. The purge gas inlet connects to the middle channel of the gas channel.

Abstract: Process chamber lids, processing chambers and methods using the lids are described. In some embodiments, the lid includes a showerhead with a plurality of heater segments in a peripheral region thereof. The heated showerhead minimizes temperature non-uniformity and/or minimizes heat less near the peripheral edge of a processed wafer.

Abstract: Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.

Abstract: A consumer may initiate a transaction using a transaction account. The transaction account issuer may transmit a notification to the consumer that the transaction has been authorized. The consumer may select requestees with whom to split the transaction. The transaction account issuer may transmit notifications to requestees to request payment from the requestees. The transaction account issuer may transfer the payment from a transaction account of the requestee to the consumer's transaction account.

Abstract: A consumer may initiate a transaction using a transaction account. The transaction account issuer may transmit a notification to the consumer that the transaction has been authorized. The consumer may select requestees with whom to split the transaction. The transaction account issuer may transmit notifications to requestees to request payment from the requestees. The transaction account issuer may transfer the payment from a transaction account of the requestee to the consumer's transaction account.

Abstract: Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.

Abstract: A consumer may initiate a transaction using a transaction account. The transaction account issuer may transmit a notification to the consumer that the transaction has been authorized. The consumer may select requestees with whom to split the transaction. The transaction account issuer may transmit notifications to requestees to request payment from the requestees. The transaction account issuer may transfer the payment from a transaction account of the requestee to the consumer's transaction account.

Abstract: A consumer may initiate a transaction using a transaction account. The transaction account issuer may transmit a notification to the consumer that the transaction has been authorized. The consumer may select requestees with whom to split the transaction. The transaction account issuer may transmit notifications to requestees to request payment from the requestees. The transaction account issuer may transfer the payment from a transaction account of the requestee to the consumer's transaction account.