Patents by Inventor Amrish Kelkar

Amrish Kelkar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION
    Publication number: 20190003960
    Abstract: Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample.
    Type: Application
    Filed: October 26, 2017
    Publication date: January 3, 2019
    Applicant: KLA-Tencor Corporation
    Inventors: Haifeng Huang, Rui-Fang Shi, Damon F. Kvamme, Amrish Kelkar
  • Methods and apparatus for polarizing reticle inspection
    Patent number: 10168273
    Abstract: Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: January 1, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Haifeng Huang, Rui-Fang Shi, Damon F. Kvamme, Amrish Kelkar