Patents by Inventor Amrit Poudel

Amrit Poudel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multimode defect classification in semiconductor inspection
    Patent number: 11668655
    Abstract: A semiconductor-inspection tool scans a semiconductor die using a plurality of optical modes. A plurality of defects on the semiconductor die are identified based on results of the scanning. Respective defects of the plurality of defects correspond to respective pixel sets of the semiconductor-inspection tool. The scanning fails to resolve the respective defects. The results include multi-dimensional data based on pixel intensity for the respective pixel sets, wherein each dimension of the multi-dimensional data corresponds to a distinct mode of the plurality of optical modes. A discriminant function is applied to the results to transform the multi-dimensional data for the respective pixel sets into respective scores. Based at least in part on the respective scores, the respective defects are divided into distinct classes.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: June 6, 2023
    Assignee: KLA Corporation
    Inventors: Vaibhav Gaind, Grace H. Chen, Amrit Poudel, Mark S. Wang
  • Multimode Defect Classification in Semiconductor Inspection
    Publication number: 20200025689
    Abstract: A semiconductor-inspection tool scans a semiconductor die using a plurality of optical modes. A plurality of defects on the semiconductor die are identified based on results of the scanning. Respective defects of the plurality of defects correspond to respective pixel sets of the semiconductor-inspection tool. The scanning fails to resolve the respective defects. The results include multi-dimensional data based on pixel intensity for the respective pixel sets, wherein each dimension of the multi-dimensional data corresponds to a distinct mode of the plurality of optical modes. A discriminant function is applied to the results to transform the multi-dimensional data for the respective pixel sets into respective scores. Based at least in part on the respective scores, the respective defects are divided into distinct classes.
    Type: Application
    Filed: February 11, 2019
    Publication date: January 23, 2020
    Inventors: Vaibhav Gaind, Grace H. Chen, Amrit Poudel, Mark S. Wang