Patents by Inventor Amuldeep S. Brar

Amuldeep S. Brar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber
    Patent number: 9786486
    Abstract: A system and method concurrently processes multiple wafers. A cassette structure includes multiple chucks and a drive spool for supporting and rotating the chucks. Each chuck holds a wafer in position while rotating. The cassette structure is loaded into a process chamber. Each chuck includes a self-locking mechanism that is activated by the centrifugal force generated from the rotation of the chuck. The self-locking mechanism centers and holds a wafer in position with respect to the chuck. A drive motor drives the drive spool, which causes the chucks to rotate. As the chucks are being rotated, a dispensing assembly delivers a processing chemical to the wafers.
    Type: Grant
    Filed: June 29, 2015
    Date of Patent: October 10, 2017
    Assignees: Samsung Electronics Co., Ltd., Samsung Austin Semiconductor, LP
    Inventors: Amuldeep S. Brar, Nampyo Lee, Woosung Han
  • PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
    Publication number: 20150303052
    Abstract: A system and method concurrently processes multiple wafers. A cassette structure includes multiple chucks and a drive spool for supporting and rotating the chucks. Each chuck holds a wafer in position while rotating. The cassette structure is loaded into a process chamber. Each chuck includes a self-locking mechanism that is activated by the centrifugal force generated from the rotation of the chuck. The self-locking mechanism centers and holds a wafer in position with respect to the chuck. A drive motor drives the drive spool, which causes the chucks to rotate. As the chucks are being rotated, a dispensing assembly delivers a processing chemical to the wafers.
    Type: Application
    Filed: June 29, 2015
    Publication date: October 22, 2015
    Inventors: Amuldeep S. Brar, Nampyo Lee, Woosung Han
  • PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
    Publication number: 20120189421
    Abstract: A system and method concurrently processes multiple wafers. A cassette structure includes multiple chucks and a drive spool for supporting and rotating the chucks. Each chuck holds a wafer in position while rotating. The cassette structure is loaded into a process chamber. Each chuck includes a self-locking mechanism that is activated by the centrifugal force generated from the rotation of the chuck. The self-locking mechanism centers and holds a wafer in position with respect to the chuck. A drive motor drives the drive spool, which causes the chucks to rotate. As the chucks are being rotated, a dispensing assembly delivers a processing chemical to the wafers.
    Type: Application
    Filed: January 21, 2011
    Publication date: July 26, 2012
    Applicant: Samsung Austin Semiconductor, L.P.
    Inventors: Amuldeep S. Brar, Nampyo Lee, Woosung Han