Abstract: In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

Abstract: In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

Abstract: A portable osmotic pump, having two pouches (4,3) in pressure-transmitting relationship, the first (4) containing a pumped fluid, such as infusate (5), and the second (3), a driving fluid (36). The driving fluid is created and pressurized by activation of an osmotic pump, and the rate of infusion is controlled by a semipermeable membrane (10). Activation can be by rupturing a seal (11) or by opening a closed tube (58) to permit permeant (2) to contact the semipermeable membrane. Pulses of the pumped fluid can be achieved by delivery pulses of the permeant to the second pouch. The pouches can be designed to resist collapse of the first pouch by external forces on the pumped liquid, such as gravity, movement of the first pouch and negative pressures applied to the pumped liquid. The infusate pouch is manufactured separately and can be stored apart from the rest of the system.

Abstract: A portable pump, useful for medical and non-medical uses, has two pouches (3, 4) in pressure transmitting relationship, the first (4) containing an infusate (5) and the second (3), a driving medium (2). The driving medium is pressurized in any of a variety of ways, including activation of osmotic pump, electrochemical reaction (19), release of pressurized fluid or gas (21, 23) or mechanical means (24). The rate of infusion is controlled by a rate controller (18). The infusate pouch is separately manufactured and can be stored apart of the rest of the system. Pulses of pumped fluid can also be delivered according to one aspect of the invention (18, 40).

Abstract: A portable infusion device assembly, having two pouches in pressure transmitting relationship, the first containing infusate and the second, a driving medium. The driving medium is pressurized by activation of osmotic pump, electrochemical reaction, release of pressurized fluid or gas or mechanical means and the rate of infusion is controlled by a rate controlling means. The infusate pouch is separately manufactured and can be stored apart of the rest of the system.

Abstract: A portable osmotic infusion device assembly, having two pouches in pressure transmitting relationship, the first containing infusate and the second, a driving fluid. The driving fluid is created and pressurized by activation of an osmotic pump, and the rate of infusion is controlled by a rate-controlling means. The infusate pouch is manufactured separately and can be stored apart from the rest of the system.

Abstract: A portable infusion device assembly where the drug is contained in a separate or separatable pouch in pressure transmitting relationship with a driving medium. The driving medium is pressurized by activation of osmotic pump, and the rate of delivery of the drug is regulated by a rate controlling means. Manufacture and sterilization of the infusate containing pouch separately from the other components of the systems to facilitates construction of sterile infusion pumps and provides an additional measure of safety.

Abstract: A life-support system including a shelter, combined with equipment for sustaining a breathable atmosphere within the shelter. The breathable atmosphere is sustained by providing a supply of fresh air to the shelter, and removing carbon dioxide from the shelter. To provide the air supply, air containing a toxic agent is fed to a membrane separation unit. The membrane unit has a high selectivity to the permeation of oxygen over toxic agent and produces an oxygen-enriched permeate stream, while rejecting almost all of the toxic agent. The oxygen-enriched air is then passed through a unit containing a sorbent, such as activated carbon, to remove any remaining traces of toxic material before being fed to the shelter.

Abstract: A protective material having a membrane layer and a sorbent layer. The membrane is a thin-film composite membrane permeable to water vapor but relatively impermeable to organic vapors. The sorbent layer includes activated carbon or other sorbent or reactive material, and captures traces of organic vapor that permeate the membrane layer. The material is particularly useful in intermediate-level protective clothing.