Patents by Inventor Amy Elizabeth MARQUARDT

Amy Elizabeth MARQUARDT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhancement of thermal atomic layer etching
    Patent number: 10787744
    Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises sequential reactions with a metal precursor and a halogen-containing gas. In other embodiments, the etching rate is increased by removing residual species bound to and/or adsorbed onto the surface.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: September 29, 2020
    Assignee: The Regents of the University of Colorado, a body corporate
    Inventors: Steven McClellan George, Nicholas Ray Johnson, Jaime Willadean Dumont, Amy Elizabeth Marquardt, Younghee Lee, David Richard Zywotko, Aziz Abdulagatov
  • Enhancement of Thermal Atomic Layer Etching
    Publication number: 20190055654
    Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises sequential reactions with a metal precursor and a halogen-containing gas. In other embodiments, the etching rate is increased by removing residual species bound to and/or adsorbed onto the surface.
    Type: Application
    Filed: July 30, 2018
    Publication date: February 21, 2019
    Inventors: STEVEN MCCLELLAN GEORGE, NICHOLAS RAY JOHNSON, JAIME WILLADEAN DUMONT, AMY ELIZABETH MARQUARDT, YOUNGHEE LEE, DAVID RICHARD ZYWOTKO, AZIZ ABDULAGATOV
  • Method of coating of object
    Patent number: 10072335
    Abstract: A method of coating a metallic object with a substantially invisible protective coating, wherein the coating comprises a first layer, a second layer, and a third layer, each layer comprising a metal oxide or a nitride. The method comprises placing the object in an atomic layer deposition (ALD) reactor; depositing a first layer comprising a metal oxide or a nitride on a surface of the object by ALD; depositing a second layer comprising a metal oxide or a nitride on the first layer by ALD; and depositing a third layer comprising a metal oxide or a nitride on the second layer by ALD, thereby forming the protective coating on the object.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: September 11, 2018
    Assignees: University of Maryland, College Park, Trustees of the Walters Art Gallery, Inc.
    Inventors: Amy Elizabeth Marquardt, Eric Breitung, Raymond J. Phaneuf, Glenn Gates, Terry Weisser
  • PROTECTIVE COATED OBJECT AND METHOD OF COATING AN OBJECT
    Publication number: 20160060758
    Abstract: A protective coated object comprises an object having a surface and a coating on the surface. The coating comprises a first layer, a second layer, and a third layer, each layer comprising a metal oxide or a nitride. The coating may be substantially transparent relative to the surface. A method of coating an object with a protective coating comprises placing the object in an atomic layer deposition (ALD) reactor; depositing a first layer comprising a metal oxide or a nitride on a surface of the object by ALD; depositing a second layer comprising a metal oxide or a nitride on the first layer by ALD; and depositing a third layer comprising a metal oxide or a nitride on the second layer by ALD, thereby forming the protective coating on the object. The produced coating may be substantially transparent relative to the surface.
    Type: Application
    Filed: August 28, 2015
    Publication date: March 3, 2016
    Inventors: Amy Elizabeth MARQUARDT, Eric BREITUNG, Raymond J. PHANEUF, Glenn GATES, Terry WEISSER