Abstract: The present invention relates to a method of making a soot particle and apparatus for making such soot particle. Preferably the method of making the soot particle is substantially free of the step of combusting a fuel and substantially free of the step of forming a plasma. Preferably, the apparatus is devoid of a heating element associated with both combustion and formation of a plasma. A preferred technique for at least one heating step for forming the doped soot particle is induction heating.

Abstract: The present invention relates to a method of making a soot particle and apparatus for making such soot particle. Preferably the method of making the soot particle is substantially free of the step of combusting a fuel and substantially free of the step of forming a plasma. Preferably, the apparatus is devoid of a heating element associated with both combustion and formation of a plasma. A preferred technique for at least one heating step for forming the soot particle is induction heating.

Abstract: A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process includes a plurality of substantially planar layers. The substantially planar layers are arranged in a generally parallel and fixed relationship and define an inlet, an outlet and a passage fluidly connecting the inlet and outlet. At least one of the layers is a distribution layer having a plurality of apertures therethrough and fluidly communicating with the passage. The plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of a flow out through the outlet. Burner adapter and assembly embodiments are also included.

Abstract: A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process includes a plurality of substantially planar layers. The substantially planar layers are arranged in a generally parallel and fixed relationship and define an inlet, an outlet and a passage fluidly connecting the inlet and outlet. At least one of the layers is a distribution layer having a plurality of apertures therethrough and fluidly communicating with the passage. The plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of a flow out through the outlet. Burner adapter and assembly embodiments are also included.

Abstract: Gas-assisted atomizing devices are provided that include liquid orifices, which release liquid, and gas orifices, which release gas to atomize the liquid into droplets. The atomizing devices are formed by at least a first layer and a second layer. The atomizing devices can include a gas supply network and a liquid supply network that supply gas and liquid to the gas and liquid orifices.

Abstract: Atomizing devices are provided that form droplets through the Rayleigh breakup mechanism. Various embodiments include one or more of the following features. Liquid orifices form jets of liquid that form droplets. Gas orifices provide gas coflow that inhibits coalescence of the droplets. The liquid orifices can have non-circular cross-sectional shapes to promote Rayleigh breakup. Fluidic oscillators can also be provided to promote Rayleigh breakup. Supply networks are provided to supply gas and liquid to the gas and liquid orifices, respectively.

Abstract: Gas-assisted atomizing devices are provided that include liquid orifices, which release liquid, and gas orifices, which release gas to atomize the liquid into droplets. The atomizing devices are formed by at least a first layer and a second layer. The atomizing devices can include a gas supply network and a liquid supply network that supply gas and liquid to the gas and liquid orifices.

Abstract: Gas-assisted atomizing devices are provided that include liquid orifices, which release liquid, and gas orifices, which release gas to atomize the liquid into droplets. The atomizing devices are formed by at least a first layer and a second layer. The atomizing devices can include a gas supply network and a liquid supply network that supply gas and liquid to the gas and liquid orifices.

Abstract: Atomizing devices are provided that form droplets through the Rayleigh breakup mechanism. Various embodiments include one or more of the following features. Liquid orifices form jets of liquid that form droplets. Gas orifices provide gas coflow that inhibits coalescence of the droplets. The liquid orifices can have non-circular cross-sectional shapes to promote Rayleigh breakup. Fluidic oscillators can also be provided to promote Rayleigh breakup. Supply networks are provided to supply gas and liquid to the gas and liquid orifices, respectively.