Abstract: A method for processing a silica-containing soot article includes exposing a silica-containing soot article to a removal gas including bromine such that the removal gas removes chlorine from the soot article.

Abstract: The invention includes methods and apparatus for depositing soot onto a glass surface to minimize water in the deposited soot and the diffusion of the water into the glass surface. The invention includes depositing a first layer of soot a on the glass surface at a first forward traverse rate and depositing a second layer of soot at a second forward traverse rate.

Abstract: The invention is directed to improving the lifetime of optical assemblies by placing such assemblies in a housing and placing a “getter” material within the housing to remove substances that affect the surface of the optical elements used in such assemblies. The “getter” materials are those materials that can remove H2O and O2 from the operating environment of the optical element. The invention is useful in protecting the optical elements of below 250 nm laser lithography systems from damage due to pitting.