Patents by Inventor Anada H. Kumar

Anada H. Kumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for supplying electricity uniformly to a workpiece
    Patent number: 6432282
    Abstract: The present invention relates to a device that supplies electricity to a substrate. In one embodiment, the device includes multiple contacts, a current sensor, and a current regulator. The current sensor is attached to each of the plurality of contacts to sense their electric current. A current regulator controls current applied to each of the multiple contacts in response to the current sensor. In another embodiment, a compliant ridge is formed about the periphery of each contact to seal the contact from undesired chemicals.
    Type: Grant
    Filed: March 2, 2000
    Date of Patent: August 13, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Shamouil Shamouilian, Anada H. Kumar, Donald J. Olgado, Joseph J. Stevens, Ricardo Leon, Jon Clinton
  • Method and apparatus for supplying electricity uniformly to a workpiece
    Publication number: 20020066664
    Abstract: The present invention relates to a device that supplies electricity to a substrate. In one embodiment, the device includes multiple contacts, a current sensor, and a current regulator. The current sensor is attached to each of the plurality of contacts to sense their electric current. A current regulator controls current applied to each of the multiple contacts in response to the current sensor. In another embodiment, a compliant ridge is formed about the periphery of each contact to seal the contact from undesired chemicals.
    Type: Application
    Filed: October 26, 2001
    Publication date: June 6, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Shamouil Shamouilian, Anada H. Kumar, Donald J. Olgado, Joseph J. Stevens, Ricardo Leon, Jon Clinton