Patents by Inventor Anand Durairajan

Anand Durairajan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus having plating solution container with current applying anodes
    Patent number: 7279084
    Abstract: A method for an electroplating cell which includes providing an anode chamber with at least two concentric anodes including an inner anode and an outer anode; generating a computer generated model with a simulation computer program; and selecting at least one current ratio from the computer generated model, with the computer generated model having a plurality of current ratios from which the at least one current ratio is selected and the one current ratio being a ratio of an inner electrical current to an outer electrical current. The method further includes applying the inner electrical current to the inner anode and the outer electrical current to the outer anode and adjusting the inner and outer electrical currents to incorporate the one current ratio. The generating of the computer generated model with the simulation computer program includes using a first iterative loop to determine a potential field in the anode chamber.
    Type: Grant
    Filed: February 6, 2004
    Date of Patent: October 9, 2007
    Assignee: Intel Corporation
    Inventors: Radek P. Chalupa, Harsono Siem Simka, Sadasivan Shankar, Daniel J. Zierath, Iouri Lantassov, Terry T. Buckley, Anand Durairajan
  • Apparatus having plating solution container with current applying anodes
    Publication number: 20050173241
    Abstract: An apparatus with a plating container with at least two anodes is described herein.
    Type: Application
    Filed: February 6, 2004
    Publication date: August 11, 2005
    Inventors: Radek Chalupa, Harsono Simka, Sadasivan Shankar, Daniel Zierath, Iouri Lantassov, Terry Buckley, Anand Durairajan