Abstract: A method comprises: causing a sample to occupy each of a plurality of analysis positions, each corresponding to a respective analysis apparatus; with the sample at each position: determining at least one transfer matrix that describes a transport motion to the analysis position from a prior position and generating an analysis data set derived by analyzing the sample using the apparatus corresponding to the position, the data set comprising a respective array of scalar values at each analyzed location; using the transfer matrices, calculating a plurality of composite transformation matrices, each expressing sample coordinates as determined by a metrological apparatus or sensor in a local coordinate system of a respective one of the other analysis apparatuses; mapping, within each data set, apparatus-specific coordinates of a feature on the sample to the data; and constructing a composite data set comprising all of the arrays of scalar values that correspond to the feature.