Patents by Inventor Anastasia Lynn Oshelski Peterson

Anastasia Lynn Oshelski Peterson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling focus based on a thickness of a layer of photoresist
    Patent number: 6709797
    Abstract: In one illustrative embodiment, a method is provided that controls a stepper to position a focal plane of a light source adjacent a top surface of a layer of photoresist. A metrology tool is used to measure a thickness of the layer of photoresist, and a controller uses the thickness measurement to determine a position of the top surface of the layer of photoresist. The controller delivers a control signal to the stepper, causing the stepper to move the focal plane of the light source adjacent the top surface of the layer of photoresist.
    Type: Grant
    Filed: May 9, 2001
    Date of Patent: March 23, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Scott Bushman, Anastasia Lynn Oshelski Peterson, Edward Christopher Stewart, Curtis Warren Doss