Abstract: A method and apparatus is provided for associating operational data with workpieces and correlating the operational data with yield data. The method comprises processing a workpiece using a processing tool, associating the operational data with the workpiece during the processing of the workpiece and measuring the yield data associated with the processed workpiece. The method further comprises correlating the operational data with the yield data to make one or more determinations.

Abstract: A method includes receiving a fault notification message associated with a fault condition in a manufacturing system. Workpiece identification information is determined for at least one workpiece associated with the fault condition based on the fault notification message. Fault state data is collected based on the workpiece identification information. A fault record including the workpiece identification information and the fault state data is stored. A manufacturing system includes a plurality of tools for processing workpieces, a fault database, and a fault monitor.

Abstract: A method and apparatus is provided for selecting control algorithms based on business rules. The method comprises processing a workpiece using a processing tool. The processing tool is capable of processing the workpiece under a control of at least a first and a second control algorithm. The method further comprises detecting an occurrence of an event that affects an operation of the processing tool, selecting at least one of the first and second control algorithm based on detecting the occurrence of the event and processing a workpiece using the processing tool in accordance with the selected control algorithm.