Patents by Inventor Anastasia Y. Tyurina

Anastasia Y. Tyurina has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Beam alignment in a lower column of a scanning electron microscope or the like
    Patent number: 6717143
    Abstract: An apparatus for imaging the surface of a sample, such as a scanning electron microscope. The apparatus generates a beam of charged particles directed at the surface, and includes an objective lens and an electrostatic lens for controlling the particle beam. The objective lens and the electrostatic lens constitute a compound lens that has an axis. The beam is controlled so that it travels along the axis of the compound lens in order to avoid adverse consequences induced by, for example, mechanical misalignments and as manifested when the focus of one of the objective and electrostatic lenses is changed during operation of the apparatus.
    Type: Grant
    Filed: April 30, 2002
    Date of Patent: April 6, 2004
    Assignee: Schlumberger Technologies Inc.
    Inventors: Paul J. Duval, Anastasia Y. Tyurina, Neal T. Sullivan
  • Beam alignment in a lower column of a scanning electron microscope or the like
    Publication number: 20030201392
    Abstract: An apparatus for imaging the surface of a sample, such as a scanning electron microscope. The apparatus generates a beam of charged particles directed at the surface, and includes an objective lens and an electrostatic lens for controlling the particle beam. The objective lens and the electrostatic lens constitute a compound lens that has an axis. The beam is controlled so that it travels along the axis of the compound lens in order to avoid adverse consequences induced by, for example, mechanical misalignments and as manifested when the focus of one of the objective and electrostatic lenses is changed during operation of the apparatus.
    Type: Application
    Filed: April 30, 2002
    Publication date: October 30, 2003
    Applicant: SCHLUMBERGER TECHNOLOGIES, INC.
    Inventors: Paul J. Duval, Anastasia Y. Tyurina, Neal T. Sullivan