Patents by Inventor Anatoly A. Vasiliev

Anatoly A. Vasiliev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10203247
    Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
    Type: Grant
    Filed: December 5, 2016
    Date of Patent: February 12, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Gregory R. Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick A. Shaughnessy, Anatoly Shchemelinin, Ilya Bezel, Muzammil A. Arain, Anatoly A. Vasiliev, James Andrew Allen, Oleg Shulepov, Andrew V. Hill, Ohad Bachar, Moshe Markowitz, Yaron Ish-Shalom, Ilan Sela, Amnon Manassen, Alexander Svizher, Maxim Khokhlov, Avi Abramov, Oleg Tsibulevsky, Daniel Kandel, Mark Ghinovker
  • Publication number: 20170146399
    Abstract: A system for providing illumination to a measurement head for optical metrology is configured to combine illumination beams from a plurality of illumination sources to deliver illumination at one or more selected wavelengths to the measurement head. The intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. Illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
    Type: Application
    Filed: December 5, 2016
    Publication date: May 25, 2017
    Inventors: Gregory R. Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick A. Shaughnessy, Anatoly Shchemelinin, Ilya Bezel, Muzammil A. Arain, Anatoly A. Vasiliev, James Andrew Allen, Oleg Shulepov, Andrew V. Hill, Ohad Bachar, Moshe Markowitz, Yaron Ish-Shalom, Ilan Sela, Amnon Manassen, Alexander Svizher, Maxim Khokhlov, Avi Abramov, Oleg Tsibulevsky, Daniel Kandel, Mark Ghinovker
  • Patent number: 9512985
    Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: December 6, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Gregory R. Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel, Muzammil A. Arain, Anatoly A. Vasiliev, James Andrew Allen, Oleg Shulepov, Andrew V. Hill, Ohad Bachar, Moshe Markowitz, Yaron Ish-Shalom, Ilan Sela, Amnon Manassen, Alexander Svizher, Maxim Khokhlov, Avi Abramov, Oleg Tsibulevsky, Daniel Kandel, Mark Ghinovker
  • Patent number: 6481864
    Abstract: A backlight assembly is disclosed having a light pipe and at least one light source located at an edge of the light pipe. The light pipe has a back surface and a front surface opposite the back surface. The light pipe also has one or more light directing, diffusing, turning, or brightness enhancing film layers adjacent the front surface. The light pipe also has an integral surface diffuser microstructure molded, embossed, or otherwise replicated in the front surface of the light pipe.
    Type: Grant
    Filed: January 12, 2001
    Date of Patent: November 19, 2002
    Assignee: Physical Optics Corporation
    Inventors: Abbas Hosseini, Hyun-Sun Chung, Anatoly Vasiliev, Gajendra D. Savant
  • Patent number: 6347873
    Abstract: A backlight assembly is disclosed having a light pipe and at least one light source located at an edge of the light pipe. The light pipe has a back surface and a front surface opposite the back surface. The light pipe also has one or more light directing, diffusing, turning, or brightness enhancing film layers adjacent the front surface. The light pipe also has an integral surface diffuser microstructure molded, embossed, or otherwise replicated in the front surface of the light pipe.
    Type: Grant
    Filed: July 8, 1999
    Date of Patent: February 19, 2002
    Assignee: Physical Optics Corporation
    Inventors: Abbas Hosseini, Hyun-Sun Chung, Anatoly Vasiliev, Gajendra D. Savant
  • Patent number: 6295405
    Abstract: A non-scattering light pipe includes a transition surface between a first side wall and an input surface and a second side wall and the input surface. The transition surface is arranged to substantially obscure the corner interfaces between the first and second side walls and the input surface such that in the corner formation any imperfections therein are not imaged into the output. Most preferably, the transition surface is optimized to provide a substantially uniform light intensity distribution. A light pipe in accordance with the preferred embodiments of the present invention is further arranged to couple to a linear light source, such as a cold cathode fluorescent light (CCFL). The light source is arranged such that dim areas, i.e., areas of the light source having non-uniform intensity, are not disposed adjacent the input surface.
    Type: Grant
    Filed: August 20, 1998
    Date of Patent: September 25, 2001
    Assignee: Physical Optics Corporation
    Inventors: Tomasz P. Jannson, Stephen A. Kupiec, Jeffrey A. Laine, Michael Rud, Anatoly Vasiliev
  • Publication number: 20010001595
    Abstract: A backlight assembly is disclosed having a light pipe and at least one light source located at an edge of the light pipe. The light pipe has a back surface and a front surface opposite the back surface. The light pipe also has one or more light directing, diffusing, turning, or brightness enhancing film layers adjacent the front surface. The light pipe also has an integral surface diffuser microstructure molded, embossed, or otherwise replicated in the front surface of the light pipe.
    Type: Application
    Filed: January 12, 2001
    Publication date: May 24, 2001
    Applicant: Physical Optics Corporation
    Inventors: Abbas Hosseini, Hyun-Sun Chung, Anatoly Vasiliev, Gajendra D. Savant
  • Patent number: 6234656
    Abstract: A fiber optic luminaire is arranged to couple light energy from a light source along its length. The fiber optic luminaire includes a plurality of light redirecting structures distributed along its length; the light redirecting structures are arranged to uniformly distribute by reflection light energy from the fiber optic luminaire. The light redirecting structures are preferably non-scattering structures, including structures such as microprisms, microfacets, microgrooves and micrometers. The fiber optic luminaire may be configured to a variety of shapes and to provide customized light distribution patterns.
    Type: Grant
    Filed: August 20, 1998
    Date of Patent: May 22, 2001
    Assignee: Physical Optics Corporation
    Inventors: Abbas Hosseini, Tomasz P. Jannson, Stephen A. Kupiec, Anatoly Vasiliev
  • Patent number: 5995742
    Abstract: A method of rapid prototyping a lighting system which is at least one of folded path and multifaceted includes determining output power of the lighting system by calculating phase space density. A method of rapid prototyping a lighting system comprises ray tracing the lighting system, determining photometric quantities which describe the lighting system based on the ray tracing step, and providing a stereoscopic three-dimensional rendering of the lighting system based on the determining step. The three-dimensional renderings reveal any hidden pseudo-image artifacts in a lighting system before the lighting system is actually fabricated. A computer system for rapid prototyping a lighting system comprises a plurality of slave processors networked to a host processor. The slave processor and the master processor cooperate to ray trace the lighting system, and the slave processors perform homogeneous independent tasks.
    Type: Grant
    Filed: July 25, 1997
    Date of Patent: November 30, 1999
    Assignee: Physical Optics Corporation
    Inventors: Tomasz P. Jannson, Stephen A. Kupiec, Andrew Kostrzewski, Mike Rud, Indra Tengara, Anatoly Vasiliev, Jeongdal Kim
  • Patent number: 5052619
    Abstract: The barrel comprises a unit (1) for initiating detonation connected to a detonation chamber (2) accommodating a combustion-to-detonation transformation accelerator (3) in the form of a space lattice arranged coaxially inside the chamber (2). The size of each cell (4) of the lattice substantially equals the size of cell of a stationary detonation wave in an explosive mixture of preferred composition. The number of cells (4) of the lattice in cross section of the detonation chamber (2) grows toward an open end of the barrel defining through passages (5) for conveying gas from the unit (1) or initiating detonation to the detonation chamber (2). The peripheral passages (5) of the lattice are arranged at an acute angle (.alpha.) to the axis of the barrel.
    Type: Grant
    Filed: August 17, 1990
    Date of Patent: October 1, 1991
    Inventors: Vladimir J. Ulyanitsky, Anatoly A. Vasiliev, Tamara P. Gavrilenko, Adolf N. Krasnov, Jury A. Nikolaev, Nikolai I. Podenkov
  • Patent number: 4452181
    Abstract: A device for heating air by flue gases in steam boilers and furnaces, comprises a supply flue, sections mating therewith, and a device for protection of heat-exchange tubes against abrasive wear arranged in the flue. Each section comprises heat-exchange tubes attached to tube plates. The device for protection of the heat-exchange tubes against abrasive wear incorporates at least one screen formed by corrugated sheets facing each other and mating along the lines of contact of sheet convex portions, whereby cells are made up.
    Type: Grant
    Filed: September 30, 1982
    Date of Patent: June 5, 1984
    Inventors: Adolf U. Lipets, Mikhail I. Nekrasov, Alexei Z. Fedosov, Vyacheslav P. Nikolaev, Viktor A. Golev, Nikolai M. Kurshin, Ivan N. Rozov, Ivan A. Sotnikov, Vladimir G. Ovchar, Alexandr G. Popov, Anatoly A. Vasiliev, Alexei D. Postnikov, Vladimir I. Dombrovsky, Vladimir K. Evstafiev