Abstract: Methods and systems for reducing illumination intensity while scanning over large particles are presented herein. A surface inspection system determines the presence of a large particle in the inspection path of a primary measurement spot using a separate leading measurement spot. The inspection system reduces the incident illumination power while the large particle is within the primary measurement spot. The primary measurement spot and the leading measurement spot are separately imaged by a common imaging collection objective onto one or more detectors. The imaging based collection design spatially separates the image of the leading measurement spot from the image of the primary measurement spot at one or more wafer image planes. Light detected from the leading measurement spot is analyzed to determine a reduced power time interval when the optical power of the primary illumination beam and the leading illumination beam are reduced.

Abstract: Methods and systems for reducing illumination intensity while scanning over large particles are presented herein. A surface inspection system determines the presence of a large particle in the inspection path of a primary measurement spot using a separate leading measurement spot. The inspection system reduces the incident illumination power while the large particle is within the primary measurement spot. The primary measurement spot and the leading measurement spot are separately imaged by a common imaging collection objective onto one or more detectors. The imaging based collection design spatially separates the image of the leading measurement spot from the image of the primary measurement spot at one or more wafer image planes. Light detected from the leading measurement spot is analyzed to determine a reduced power time interval when the optical power of the primary illumination beam and the leading illumination beam are reduced.

Abstract: A derrick is provided with a vertically movable elevator for suspending a string of elongated well elements, such as pipes. An immovable lower support is provided for suspending the string, and an automatic tong is provided for screwing and unscrewing pipes to and from the string. A manipulator grips and delivers a pipe to an operating position in axial alignment with the well bore. A control system includes position sensors for sensing the positions of a well pipe, one of which sensors is mounted on the elevator, a second sensor is mounted on the automatic tong, and a third sensor is mounted on the manipulator. The control system also includes a programmed logical control unit, through which the sensors are connected to a drive system. The first sensor is connected to a drive for vertically moving the elevator, a drive for closing and opening grippers on the elevator, and a drive adapted to transversely move the automatic tong.