Patents by Inventor Anatoly Grayfer
Anatoly Grayfer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110114129Abstract: Components, systems, and methods for maintaining an extremely dry environment within substrate containers formed of polymers provides supplemental exterior gas washing of the substrate container to minimize permeation of moisture and oxygen through the polymer walls of the container and to control desorption of water entrapped in the polymer walls of the container.Type: ApplicationFiled: December 18, 2008Publication date: May 19, 2011Applicant: ENTEGRIS, INC.Inventors: Oleg P. Kishkovich, David L. Halbmaier, Anatoly Grayfer
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Patent number: 7922791Abstract: The present invention provides a filtering system for a semiconductor processing tool. In one embodiment, the filtering system is associated with the semiconductor processing tool. A system of the invention comprises a first and second filter layer in fluid communication with a gas flow path. The flow path is a gas stream comprising volatile silica containing compounds such as hexamethyldisiloxane and trimethylsilanol. The gas flow path passes through the first and second filter layer to fluidly communicate with the semiconductor processing tool. Preferably, the first filter layer of the filtering system is upstream along the gas flow path from the second filter layer. The medias of the first and second filter layers are selected and arranged based on given contaminant concentrations.Type: GrantFiled: July 13, 2007Date of Patent: April 12, 2011Assignee: Entegris, Inc.Inventors: Anatoly Grayfer, Oleg P. Kishkovich
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Publication number: 20090320681Abstract: The present invention provides a filtering system for a semiconductor processing tool. In one embodiment, the filtering system is associated with the semiconductor processing tool. A system of the invention comprises a first and second filter layer in fluid communication with a gas flow path. The flow path is a gas stream comprising volatile silica containing compounds such as hexamethyldisiloxane and trimethylsilanol. The gas flow path passes through the first and second filter layer to fluidly communicate with the semiconductor processing tool. Preferably, the first filter layer of the filtering system is upstream along the gas flow path from the second filter layer. The medias of the first and second filter layers are selected and arranged based on given contaminant concentrations.Type: ApplicationFiled: July 13, 2007Publication date: December 31, 2009Applicant: Entegris, Inc.Inventors: Anatoly Grayfer, Oleg P. Kishkovich
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Patent number: 7540901Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: GrantFiled: February 28, 2006Date of Patent: June 2, 2009Assignee: Entegris, Inc.Inventors: Oleg P. Kishkovich, Devon Kinkead, Anatoly Grayfer, William M. Goodwin, David Ruede
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Publication number: 20080257159Abstract: The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.Type: ApplicationFiled: February 11, 2008Publication date: October 23, 2008Applicant: Entegris, Inc.Inventors: William M. Goodwin, Oleg P. Kishkovich, Anatoly Grayfer
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Patent number: 7430893Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.Type: GrantFiled: December 1, 2004Date of Patent: October 7, 2008Assignee: Entegris, Inc.Inventors: Anatoly Grayfer, Jürgen Michael Lobert, William Goodwin, Frank Vincent Belanger, John E. Sergi, Mark C. Phelps
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Patent number: 7329308Abstract: The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.Type: GrantFiled: July 9, 2004Date of Patent: February 12, 2008Assignee: Entegris, Inc.Inventors: William M. Goodwin, Oleg P. Kishkovich, Anatoly Grayfer
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Publication number: 20080009099Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.Type: ApplicationFiled: May 19, 2006Publication date: January 10, 2008Inventors: Oleg Kishkovich, Anatoly Grayfer, William Goodwin, Devon Kinkead
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Patent number: 7092077Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.Type: GrantFiled: September 15, 2003Date of Patent: August 15, 2006Assignee: Entegris, Inc.Inventors: Oleg P. Kishkovich, Anatoly Grayfer, William M. Goodwin, Devon Kinkead
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Publication number: 20060169139Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: ApplicationFiled: February 28, 2006Publication date: August 3, 2006Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede
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Publication number: 20060108221Abstract: A method and apparatus for improving measurement accuracy in a gas monitoring system is provided. The apparatus can be connected to a plurality of gas sample lines each containing a gas sample. The gas samples are routed through a number of delivery channels which are fewer in number than the plurality of sample lines. Each delivery channel is alternatively coupled to a detector which identifies contaminants present in the gas samples. Each delivery channel includes a voltage sensitive orifice (VSO). The VSO's are operated by a controller and provide gas samples at a constant flow and a constant pressure to the detector independent of the length of the gas sample line being measured.Type: ApplicationFiled: November 24, 2004Publication date: May 25, 2006Inventors: William Goodwin, Mark Phelps, Jurgen Lobert, Bruce Laquidara, Anatoly Grayfer
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Patent number: 7014693Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: GrantFiled: May 21, 2004Date of Patent: March 21, 2006Assignee: Mykrolis CorporationInventors: Oleg P. Kishkovich, Devon Kinkead, Anatoly Grayfer, William M. Goodwin, David Ruede
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Publication number: 20050183490Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.Type: ApplicationFiled: December 1, 2004Publication date: August 25, 2005Inventors: Anatoly Grayfer, Jurgen Lobert, William Goodwin, Frank Belanger, John Sergi, Mark Phelps
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Publication number: 20050120775Abstract: The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.Type: ApplicationFiled: September 2, 2004Publication date: June 9, 2005Applicant: Extraction Systems, Inc.Inventors: Anatoly Grayfer, Jurgen Lobert, William Goodwin, Frank Belanger, John Sergi, Mark Phelps
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Publication number: 20050081715Abstract: The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.Type: ApplicationFiled: July 9, 2004Publication date: April 21, 2005Applicant: Extraction Systems, Inc.Inventors: William Goodwin, Oleg Kishkovich, Anatoly Grayfer
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Publication number: 20050051030Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: ApplicationFiled: May 21, 2004Publication date: March 10, 2005Applicant: Extraction Systems, Inc.Inventors: Oleg Kishkovich, Devon Kinkead, Anatoly Grayfer, William Goodwin, David Ruede
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Publication number: 20040166679Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.Type: ApplicationFiled: September 15, 2003Publication date: August 26, 2004Applicant: Extraction Systems, Inc.Inventors: Oleg P. Kishkovich, Anatoly Grayfer, William M. Goodwin, Devon Kinkead
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Patent number: 6761753Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: GrantFiled: July 26, 2002Date of Patent: July 13, 2004Assignee: Extraction Systems, Inc.Inventors: Oleg P. Kishkovich, Devon Kinkead, Anatoly Grayfer, William M. Goodwin, David Ruede
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Patent number: 6740147Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: GrantFiled: May 4, 2001Date of Patent: May 25, 2004Assignee: Extraction Systems, Inc.Inventors: Oleg P. Kishkovich, Devon Kinkead, Anatoly Grayfer, William M. Goodwin, David Ruede
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Patent number: RE44536Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.Type: GrantFiled: June 1, 2011Date of Patent: October 15, 2013Assignee: Entegris, Inc.Inventors: Oleg P. Kishkovich, Devon Kinkead, Anatoly Grayfer, William M. Goodwin, David Ruede