Patents by Inventor Anatoly Schemelinin

Anatoly Schemelinin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and systems for providing illumination of a specimen for a process performed on the specimen
    Patent number: 7705331
    Abstract: Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: April 27, 2010
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Greg Kirk, Rich Solarz, Chris Kirk, Gil Delgado, Anatoly Schemelinin, Jim Li, Qibiao Chen, Charles Nenghe Wang