Patents by Inventor Anchor Chen

Anchor Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7608473
    Abstract: An image sensor and a manufacturing method thereof are provided. The image sensor includes a plurality of sensors, an inter-layer dielectric layer formed over the sensors, a first inter-metal dielectric layer formed over the inter-layer dielectric layer, and a plurality of first via walls formed in the first inter-metal dielectric layer, wherein each of the first via walls is formed around each of the sensors. In addition, the image sensor further includes a second inter-metal dielectric layer formed over the first inter-metal dielectric layer and a plurality of second via walls formed in the second inter-metal dielectric layer, wherein each of the second via walls is formed around each of the sensors. Therefore, the light leakage between different pixels and the problem of crosstalk are solved, and the spatial resolution and the photo sensitivity of the image sensor are enhanced.
    Type: Grant
    Filed: April 5, 2005
    Date of Patent: October 27, 2009
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Patent number: 7598551
    Abstract: The invention is directed to a method for manufacturing a high voltage device. The method includes steps of providing a substrate and then forming a first doped region having a first conductive type in the substrate. At least two second doped regions having a second conductive type are formed in the substrate. The second doped regions are located adjacent to both sides of the first doped region respectively, and the first doped region is separated from the second doped regions with an isolation region. A gate structure is formed on the substrate between the second doped regions and a source/drain region having the second doped region is formed in the substrate adjacent to both sides of the gate structure.
    Type: Grant
    Filed: June 4, 2008
    Date of Patent: October 6, 2009
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Patent number: 7485523
    Abstract: The invention is directed to a method for manufacturing a high voltage device. The method comprises steps of providing a substrate and then forming a first doped region having a first conductive type in the substrate. At least two second doped regions having a second conductive type are formed in the substrate, wherein the second doped regions are located adjacent to both sides of the first doped region respectively, and the first doped region is separated from the second doped regions with an isolation region. A gate structure is formed on the substrate between the second doped regions and a source/drain region having the second doped region is formed in the substrate adjacent to both sides of the gate structure.
    Type: Grant
    Filed: December 12, 2005
    Date of Patent: February 3, 2009
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Publication number: 20080277744
    Abstract: The invention is directed to a method for manufacturing a high voltage device. The method includes steps of providing a substrate and then forming a first doped region having a first conductive type in the substrate. At least two second doped regions having a second conductive type are formed in the substrate. The second doped regions are located adjacent to both sides of the first doped region respectively, and the first doped region is separated from the second doped regions with an isolation region. A gate structure is formed on the substrate between the second doped regions and a source/drain region having the second doped region is formed in the substrate adjacent to both sides of the gate structure.
    Type: Application
    Filed: June 4, 2008
    Publication date: November 13, 2008
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventor: Anchor Chen
  • Patent number: 7297991
    Abstract: A bipolar junction transistor includes a dielectric layer formed on a predetermined region of a substrate, an opening formed in the dielectric layer and a portion of the substrate being exposed, a semiconductor layer formed on a sidewall and a bottom of the opening and on a portion of the dielectric layer outside the opening, a spacer formed on the semiconductor layer to define a self-aligned emitter region in the opening, an emitter conductivity layer being filled with the self-aligned emitter region and a PN junction being formed between the emitter conductivity layer and the semiconductor layer, and a salicide layer formed on the emitter conductivity layer and on the portion of the semiconductor layer extending outside the opening.
    Type: Grant
    Filed: May 14, 2004
    Date of Patent: November 20, 2007
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Patent number: 7244975
    Abstract: A high-voltage device structure includes a high-voltage device disposed on a semiconductor substrate. The semiconductor includes an active region and an isolation region, and the high-voltage device is disposed in the active region. The high-voltage device structure includes a source diffusion region of a first conductive type, a drain region of the first conductive type, and a gate longer than the source diffusion region and the drain diffusion region so as to form spare regions on both sides of the gate. The isolation region is outside the active region and surrounds the active region. In the isolation region, an isolation ion implantation region of a second conductive type and an extended ion implantation region are disposed to prevent parasitic current from being generating between the source diffusion region and the drain diffusion region.
    Type: Grant
    Filed: July 5, 2005
    Date of Patent: July 17, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Anchor Chen, Chih-Hung Lin, Hwi-Huang Chen, Jih-Wei Liou, Chin-Hung Liu, Ming-Tsung Tung, Chien-Ming Lin, Jung-Ching Chen
  • Patent number: 7235833
    Abstract: An image sensor and a manufacturing method thereof are provided. The image sensor includes a plurality of sensors, an inter-layer dielectric layer formed over the sensors, a first inter-metal dielectric layer formed over the inter-layer dielectric layer, and a plurality of first via walls formed in the first inter-metal dielectric layer, wherein each of the first via walls is formed around each of the sensors. In addition, the image sensor further includes a second inter-metal dielectric layer formed over the first inter-metal dielectric layer and a plurality of second via walls formed in the second inter-metal dielectric layer, wherein each of the second via walls is formed around each of the sensors. Therefore, the light leakage between different pixels and the problem of crosstalk are solved, and the spatial resolution and the photo sensitivity of the image sensor are enhanced.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: June 26, 2007
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Patent number: 7211493
    Abstract: A variable capacitor comprising a substrate having a first type ion-doped buried layer, a first type ion-doped well, a second type ion-doped region and a conductive layer thereon. The first type ion-doped well is formed within the substrate. The first type ion-doped well has a cavity. The first type ion-doped buried layer is in the substrate underneath the first type ion-doped well. The first type ion-doped buried layer and the first type ion-doped well are connected. The second type ion-doped region is at the bottom of the cavity of the first type ion-doped well. The conductive layer is above and in connection with the first type ion-doped buried layer.
    Type: Grant
    Filed: July 29, 2003
    Date of Patent: May 1, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Jin-Horng Gau, Anchor Chen
  • Publication number: 20070018258
    Abstract: A high-voltage device structure includes a high-voltage device disposed on a semiconductor substrate. The semiconductor includes an active region and an isolation region, and the high-voltage device is disposed in the active region. The high-voltage device structure includes a source diffusion region of a first conductive type, a drain region of the first conductive type, and a gate longer than the source diffusion region and the drain diffusion region so as to form spare regions on both sides of the gate. The isolation region is outside the active region and surrounds the active region. In the isolation region, an isolation ion implantation region of a second conductive type and an extended ion implantation region are disposed to prevent parasitic current from being generating between the source diffusion region and the drain diffusion region.
    Type: Application
    Filed: July 5, 2005
    Publication date: January 25, 2007
    Inventors: Anchor Chen, Chih-Hung Lin, Hwi-Huang Chen, Jih-Wei Liou, Chin-Hung Liu, Ming-Tsung Tung, Chien-Ming Lin, Jung-Ching CHEN
  • Patent number: 7157766
    Abstract: A variable capacitor comprising a substrate having a first type ion-doped buried layer, a first type ion-doped well, a second type ion-doped region and a conductive layer thereon. The first type ion-doped well is formed within the substrate. The first type ion-doped well has a cavity. The first type ion-doped buried layer is in the substrate underneath the first type ion-doped well. The first type ion-doped buried layer and the first type ion-doped well are connected. The second type ion-doped region is at the bottom of the cavity of the first type ion-doped well. The conductive layer is above and in connection with the first type ion-doped buried layer.
    Type: Grant
    Filed: August 18, 2004
    Date of Patent: January 2, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Jing-Horng Gau, Anchor Chen
  • Publication number: 20060240628
    Abstract: The invention is directed to a method for manufacturing a high voltage device. The method comprises steps of providing a substrate and then forming a first doped region having a first conductive type in the substrate. At least two second doped regions having a second conductive type are formed in the substrate, wherein the second doped regions are located adjacent to both sides of the first doped region respectively, and the first doped region is separated from the second doped regions with an isolation region. A gate structure is formed on the substrate between the second doped regions and a source/drain region having the second doped region is formed in the substrate adjacent to both sides of the gate structure.
    Type: Application
    Filed: December 12, 2005
    Publication date: October 26, 2006
    Inventor: Anchor Chen
  • Patent number: 6989557
    Abstract: A bipolar junction transistor (BJT) includes a dielectric layer formed on a predetermined region of a substrate, an opening formed in the dielectric layer and a portion of the substrate being exposed, a heavily doped polysilicon layer formed on a sidewall of the opening to define a self-aligned base region in the opening, an intrinsic base doped region formed within the substrate and in a bottom of the opening by implanting through the self-aligned base region, a spacer formed on the heavily doped polysilicon layer to define a self-aligned emitter region in the opening, and an emitter conductivity layer being filled with the self-aligned emitter region and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.
    Type: Grant
    Filed: May 14, 2004
    Date of Patent: January 24, 2006
    Assignee: United Microelectronics Corp.
    Inventor: Anchor Chen
  • Publication number: 20050255664
    Abstract: A method of forming a capacitor includes sequentially forming a barrier layer, a second dielectric layer, and a conductive layer on a surface of a first dielectric layer and conductors in the first dielectric layer, performing an etching process to remove portions of the barrier layer, the second dielectric layer, and the conductive layer to form the capacitor, and performing a contacting process to connect the conductive layer of the capacitor to a first terminal through a first contact plug.
    Type: Application
    Filed: May 5, 2005
    Publication date: November 17, 2005
    Inventors: Ching-Hung Kao, Anchor Chen
  • Publication number: 20050247963
    Abstract: An image sensor and a manufacturing method thereof are provided. The image sensor includes a plurality of sensors, an inter-layer dielectric layer formed over the sensors, a first inter-metal dielectric layer formed over the inter-layer dielectric layer, and a plurality of first via walls formed in the first inter-metal dielectric layer, wherein each of the first via walls is formed around each of the sensors. In addition, the image sensor further includes a second inter-metal dielectric layer formed over the first inter-metal dielectric layer and a plurality of second via walls formed in the second inter-metal dielectric layer, wherein each of the second via walls is formed around each of the sensors. Therefore, the light leakage between different pixels and the problem of crosstalk are solved, and the spatial resolution and the photo sensitivity of the image sensor are enhanced.
    Type: Application
    Filed: May 4, 2004
    Publication date: November 10, 2005
    Inventor: Anchor Chen
  • Publication number: 20050250242
    Abstract: An image sensor and a manufacturing method thereof are provided. The image sensor includes a plurality of sensors, an inter-layer dielectric layer formed over the sensors, a first inter-metal dielectric layer formed over the inter-layer dielectric layer, and a plurality of first via walls formed in the first inter-metal dielectric layer, wherein each of the first via walls is formed around each of the sensors. In addition, the image sensor further includes a second inter-metal dielectric layer formed over the first inter-metal dielectric layer and a plurality of second via walls formed in the second inter-metal dielectric layer, wherein each of the second via walls is formed around each of the sensors. Therefore, the light leakage between different pixels and the problem of crosstalk are solved, and the spatial resolution and the photo sensitivity of the image sensor are enhanced.
    Type: Application
    Filed: April 5, 2005
    Publication date: November 10, 2005
    Inventor: Anchor Chen
  • Patent number: 6905935
    Abstract: A semiconductor wafer includes a first doping region of a first conductivity type, a second doping region of a second conductivity type, and a plurality of isolated structures positioned on surfaces of the first doping region and the second doping region. A third doping region of the first conductivity type is formed in an upper portion of the second doping region. A shielding layer is formed and a portion of the shielding layer is removed to form an opening shielding layer to expose a portion of the third doping region. Subsequently, a doping layer of the second conductivity type is formed on a surface of the third doping region. A self-aligned silicidation process is performed to form a silicide layer on the surfaces of the second doping region, the third doping region and the doping layer, the silicide layer functioning as a contact region of a vertical bipolar junction transistor.
    Type: Grant
    Filed: December 2, 2003
    Date of Patent: June 14, 2005
    Assignee: United Micrelectronics Corp.
    Inventors: Jing-Horng Gau, Anchor Chen
  • Publication number: 20050118772
    Abstract: A semiconductor wafer includes a first doping region of a first conductivity type, a second doping region of a second conductivity type, and a plurality of isolated structures positioned on surfaces of the first doping region and the second doping region. A third doping region of the first conductivity type is formed in an upper portion of the second doping region. A shielding layer is formed and a portion of the shielding layer is removed to form an opening shielding layer to expose a portion of the third doping region. Subsequently, a doping layer of the second conductivity type is formed on a surface of the third doping region. A self-aligned silicidation process is performed to form a silicide layer on the surfaces of the second doping region, the third doping region and the doping layer, the silicide layer functioning as a contact region of a vertical bipolar junction transistor.
    Type: Application
    Filed: December 2, 2003
    Publication date: June 2, 2005
    Inventors: Jing-Horng Gau, Anchor Chen
  • Patent number: 6884689
    Abstract: A method for fabricating a self-aligned bipolar transistor, wherein a substrate having an epitaxial layer formed thereon as a base is provided. After this, a first dielectric layer, a second dielectric layer are sequentially formed on the epitaxial layer, followed by forming an opening in the second dielectric layer. A conductive spacer is formed on the sidewall of the opening. Using the second dielectric layer and the conductive spacer as a mask, a first dielectric layer in the opening is removed. A conductive layer is then formed in the opening as an emitter, followed by completely removing the second dielectric layer. A doping is conducted on the emitter. Using the emitter and the conductive spacer as a mask, a part of the first dielectric layer is removed. Further using the emitter and the conductive spacer as a mask, another doping is conducted to form a part of the epitaxial layer as a base contact region.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: April 26, 2005
    Assignee: United Microelectronics Corp.
    Inventors: Shu-Ya Chuang, Jing-Horng Gau, Anchor Chen
  • Patent number: 6882029
    Abstract: A PN-junction varactor includes a first ion well of first conductivity type formed on a semiconductor substrate of second conductivity type. A first dummy gate is formed over the first ion well. A first gate dielectric layer is formed between the first dummy gate and the first ion well. A second dummy gate is formed over the first ion well at one side of the first dummy gate. A second gate dielectric layer is formed between the second dummy gate and the first ion well. A first heavily doped region of the second conductivity type is located in the first ion well between the first dummy gate and the second dummy gate. The first heavily doped region of the second conductivity type serving as an anode of the PN-junction varactor.
    Type: Grant
    Filed: November 27, 2003
    Date of Patent: April 19, 2005
    Assignee: United Microelectronics Corp.
    Inventors: Jing-Horng Gau, Anchor Chen
  • Publication number: 20050040470
    Abstract: A method for fabricating a self-aligned bipolar transistor, wherein a substrate having an epitaxial layer formed thereon as a base is provided. After this, a first dielectric layer, a second dielectric layer are sequentially formed on the epitaxial layer, followed by forming an opening in the second dielectric layer. A conductive spacer is formed on the sidewall of the opening. Using the second dielectric layer and the conductive spacer as a mask, a first dielectric layer in the opening is removed. A conductive layer is then formed in the opening as an emitter, followed by completely removing the second dielectric layer. A doping is conducted on the emitter. Using the emitter and the conductive spacer as a mask, a part of the first dielectric layer is removed. Further using the emitter and the conductive spacer as a mask, another doping is conducted to form a part of the epitaxial layer as a base contact region.
    Type: Application
    Filed: September 28, 2004
    Publication date: February 24, 2005
    Inventors: Shu-Ya Chuang, Jing-Horng Gau, Anchor Chen