Abstract: The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom electrically conducting layer, one or more electrically conducting vias and a top electrically conducting layer are created. The bottom layer is connected to the vias and vias are connected to the top layer. The vias are formed by filling at least one of the one or more through-going openings. The method further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor.

Abstract: The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom electrically conducting layer, one or more electrically conducting vias and a top electrically conducting layer are created. The bottom layer is connected to the vias and vias are connected to the top layer. The vias are formed by filling at least one of the one or more through-going openings. The method further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor.

Abstract: The present invention relates to a power generation system PGS comprising—a system intermediate output SIO, —a central controller CC, and—at least two DC/DC converters DD1, DD2, DDn each comprising—a power input PI1, PI2, PIn for connecting to an output of one or more solar cells SC1, SC2, SCn, —a control input CI1, CI2, CIn, and—a power output PO1, PO2, POn, wherein said power outputs PO1, PO2, POn of said at least two DC/DC converters DD1, DD2, DDn are coupled in series to establish an accumulated system output voltage or in parallel to establish an accumulated system output current, or a combination thereof, at said system intermediate output ISO, and wherein said central controller CC is arranged to be able to selectively set, via said control inputs CI1, CI2, CIn, an output state of each of at least two of said DC/DC converters DD1, DD2, DDn.

Abstract: The present invention relates to a micro total analysis system comprising a spectroscope and a method of manufacturing such a system comprising a spectroscope in a one step process. More over the invention relates to a method of analyzing a sample in the system. The micro total analysis system comprising a spectroscope provided on a substrate and for measuring electromagnetic radiation and at least one microfluidic channel. The spectroscope comprises: a slab waveguide for guiding electromagnetic waves towards a diffraction grating dispersing the electromagnetic waves into their component wavelengths, and output means for receiving the deflected electromagnetic waves. At least a part of the microfluidic channel, the slab waveguide and the grating comprises the same main material, such as a polymer material.

Abstract: The present invention relates to a micro total analysis system comprising a spectroscope and a method of manufacturing such a system comprising a spectroscope in a one step process. More over the invention relates to a method of analyzing a sample in the system. The micro total analysis system comprising a spectroscope provided on a substrate and for measuring electromagnetic radiation and at least one microfluidic channel. The spectroscope comprises: a slab waveguide for guiding electromagnetic waves towards a diffraction grating dispersing the electromagnetic waves into their component wavelengths, and output means for receiving the deflected electromagnetic waves. At least a part of the microfluidic channel, the slab waveguide and the grating comprises the same main material, such as a polymer material.