Abstract: A sensitivity analysis arrangement using entropy is disclosed. The arrangement includes a design of experiments component, a simulation component and an entropy controller. The design of experiments component is configured to generate a set of factors of a response for a device and to generate a design of experiments using the set of factors. The simulation/measurement component is configured to obtain response values for the design of experiments and the set of factors. The entropy controller is configured to determine a set of entropy values for the set of factors and to determine a reduced set of relevant factors based on the set of entropy values. The reduced set of relevant factors is a subset of the factors.

Abstract: A sensitivity analysis arrangement using local gradients is disclosed. The arrangements include a design of experiments component, a simulation/measurement component and an analysis component. The design of experiments component is configured to generate a set of factors of a response for a device and to generate a design of experiments using the set of factors. The simulation component is configured to obtain response values for the design of experiments and the set of factors. The controller is configured to determine a reduced set of relevant factors based on the response values using local gradients. The reduced set of relevant factors is a subset of the factors.

Abstract: A performance estimation method includes determining, for a device response that is dependent on first factors and second factors, a plurality of response distributions including at least one of: a measured response distribution of a production set corresponding to a setting of the first factors, the production set including a plurality of manufactured units; a response distribution simulated in accordance with a simulation model and with a combined factor setting of the first factors and the second factors; and a response distribution estimated in accordance with the combined factor setting and in accordance with a response prediction model relating the device response to the first factors and to the second factors. The method also includes estimating, in accordance with the plurality of response distributions, a performance metric prediction model relating a performance metric to the first factors.