Patents by Inventor Andr?eacute; Egbert

Andr?eacute; Egbert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for generating euv radiation
    Publication number: 20030189176
    Abstract: The invention relates to a method for generating EUV radiation. Laser pulses are directed onto photoelectric transducer means (10), which generate pulses of electrically charged particles (6) as a result of the action of the laser pulses. The electrically charged particles are accelerated in an electric field and directed onto a target (4), in such a way that the target generates a plasma, which emits EUV radiation, as a result of the action of the electrically charged particles.
    Type: Application
    Filed: November 12, 2002
    Publication date: October 9, 2003
    Inventors: Boris Chichkov, Andr?eacute; Egbert