Patents by Inventor André Orthen

André Orthen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing an illumination system for an EUV projection exposure system, and illumination system
    Patent number: 11048172
    Abstract: The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: June 29, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen, Joachim Welker, Markus Holz, Hubert Holderer
  • METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION EXPOSURE SYSTEM, AND ILLUMINATION SYSTEM
    Publication number: 20200110340
    Abstract: The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus
    Type: Application
    Filed: December 5, 2019
    Publication date: April 9, 2020
    Inventors: Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen, Joachim Welker, Markus Holz, Hubert Holderer
  • Method for producing an illumination system for an EUV projection exposure system, and illumination system
    Patent number: 10514608
    Abstract: The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: December 24, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen, Joachim Welker, Markus Holz, Hubert Holderer
  • METHOD FOR PRODUCING AN ILLUMINATION SYSTEM FOR AN EUV PROJECTION EXPOSURE SYSTEM, AND ILLUMINATION SYSTEM
    Publication number: 20180373158
    Abstract: The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus
    Type: Application
    Filed: August 28, 2018
    Publication date: December 27, 2018
    Inventors: Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen, Joachim Welker, Markus Holz, Hubert Holderer