Patents by Inventor András Major

András Major has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PARTICLE BEAM SYSTEM
    Publication number: 20250379030
    Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.
    Type: Application
    Filed: August 25, 2025
    Publication date: December 11, 2025
    Inventors: Dirk Zeidler, Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, András Major
  • PARTICLE BEAM SYSTEM
    Publication number: 20250232951
    Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.
    Type: Application
    Filed: April 4, 2025
    Publication date: July 17, 2025
    Inventors: Dirk Zeidler, Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, András Major
  • Particle beam system
    Patent number: 12293896
    Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: May 6, 2025
    Assignee: Carl Zeiss MultiSEM GmbH
    Inventors: Dirk Zeidler, Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, András Major
  • Particle Beam System
    Publication number: 20210142980
    Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.
    Type: Application
    Filed: December 17, 2020
    Publication date: May 13, 2021
    Inventors: Dirk Zeidler, Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, András Major