Patents by Inventor André Stesmans

André Stesmans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for post-oxidation heating of a structure comprising SiO2
    Patent number: 6358866
    Abstract: The present invention is related to a method for post-oxidation heating of at least one substrate comprising at least a SiO2 layer or a SiO2/poly-Si layer structure, comprising the steps of: creating an inert gaseous ambient in a furnace, said ambient having a partial pressure within a predetermined range and said gaseous ambient comprising helium molecules, which have a suitable diameter for penetrating into the SiO2 and/or the poly-Si material; placing the substrate into said ambient; thereafter heating said furnace to a temperature of at least 200° C. for a predetermined period of time; cooling said furnace while maintaining said gaseous ambient in said predetermined pressure range in said furnace.
    Type: Grant
    Filed: July 1, 1999
    Date of Patent: March 19, 2002
    Assignees: IMEC vzw, Katholieke Universiteit Leuven Research and Development
    Inventors: André Stesmans, Valery V. Afanas'ev