Patents by Inventor Andre Schenk

Andre Schenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9559204
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: January 13, 2015
    Date of Patent: January 31, 2017
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20150123201
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: January 13, 2015
    Publication date: May 7, 2015
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8946034
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: November 22, 2013
    Date of Patent: February 3, 2015
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20140077299
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: November 22, 2013
    Publication date: March 20, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8624334
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: January 7, 2014
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20110278680
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: July 29, 2011
    Publication date: November 17, 2011
    Applicant: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Patent number: 8003470
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Grant
    Filed: September 13, 2005
    Date of Patent: August 23, 2011
    Assignee: Infineon Technologies AG
    Inventors: Helmut Horst Tews, Andre Schenk
  • Publication number: 20070249128
    Abstract: Dielectric layers are formed on a substrate by performing Subatmospheric Chemical Vapor Deposition (SACVD) of ozone-tetraethoxysilane (O3-TEOS) to form a layer of O3-TEOS on the substrate, and treating the layer of O3-TEOS with ultraviolet (UV) radiation. The UV radiation treatment can increase the tensile stress in the O3-TEOS layer by reducing the amount of water in the layer. Moreover, the UV treatment may also reduce the amount of silanol in the O3-TEOS layer, which can also increase reliability of the device.
    Type: Application
    Filed: April 19, 2006
    Publication date: October 25, 2007
    Inventors: Junjung Kim, JaeEon Park, Johnny Widodo, Andre Schenk, Alois Gutmann, Roland Hampp
  • Patent number: 7219060
    Abstract: A high quality speech synthesizer in various embodiments concatenates speech waveforms referenced by a large speech database. Speech quality is further improved by speech unit selection and concatenation smoothing.
    Type: Grant
    Filed: December 1, 2003
    Date of Patent: May 15, 2007
    Assignee: Nuance Communications, Inc.
    Inventors: Geert Coorman, Filip Deprez, Mario De Bock, Justin Fackrell, Steven Leys, Peter Rutten, Jan De Moortel, Andre Schenk, Bert Van Coile
  • Publication number: 20070057324
    Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    Type: Application
    Filed: September 13, 2005
    Publication date: March 15, 2007
    Inventors: Helmut Tews, Andre Schenk
  • Publication number: 20060004887
    Abstract: There is disclosed a method and a device for generating distributed applications for each level in a multi-level database environment, comprising: receiving an integrated configuration code comprising code sections for all information required for generating an application in each of said levels, parsing all code sections in said integrated configuration code required for at least one level of said multi-level environment, extracting said parsed code sections for said at least one level, and converting said extracted code sections into level-specific application code for each extracted level.
    Type: Application
    Filed: April 4, 2002
    Publication date: January 5, 2006
    Inventor: Andre Schenk
  • Patent number: 6919264
    Abstract: A method is provided for the solder-stop structuring of elevations on wafers, such as 3D contact structures in the form of resilient or compliant contact bumps, which are connected electrically via a metallization layer to a bonding pad on the wafer, the metallization layer extending over the 3D structure and consisting of a Cu/Ni layer which is covered with a Au layer. The present invention provides a method for the solder-stop structuring of elevations on wafers which can be implemented simply and reliably to produce a reliable solder stop and good flank protection of the 3D structure. According to the invention, a resist is deposited on the tip of a 3D structure and a solder stop layer is then deposited over the metallization, including the resist. The resist on the tip of the 3D structure, including the solder stop layer covering the resist, is subsequently removed so that the Au layer on the tip of the 3D structure is exposed.
    Type: Grant
    Filed: September 5, 2003
    Date of Patent: July 19, 2005
    Assignee: Infineon Technologies AG
    Inventors: Axel Brintzinger, Ingo Uhlendorf, Andre Schenk, Alexander Wollanke
  • Publication number: 20040111266
    Abstract: A high quality speech synthesizer in various embodiments concatenates speech waveforms referenced by a large speech database. Speech quality is further improved by speech unit selection and concatenation smoothing.
    Type: Application
    Filed: December 1, 2003
    Publication date: June 10, 2004
    Inventors: Geert Coorman, Filip Deprez, Mario De Bock, Justin Fackrell, Steven Leys, Peter Rutten, Jan DeMoortel, Andre Schenk, Bert Van Coile
  • Publication number: 20040087131
    Abstract: A method is provided for the solder-stop structuring of elevations on wafers, such as 3D contact structures in the form of resilient or compliant contact bumps, which are connected electrically via a metallization layer to a bonding pad on the wafer, the metallization layer extending over the 3D structure and consisting of a Cu/Ni layer which is covered with a Au layer. The present invention provides a method for the solder-stop structuring of elevations on wafers which can be implemented simply and reliably to produce a reliable solder stop and good flank protection of the 3D structure. According to the invention, a resist is deposited on the tip of a 3D structure and a solder stop layer is then deposited over the metallization, including the resist. The resist on the tip of the 3D structure, including the solder stop layer covering the resist, is subsequently removed so that the Au layer on the tip of the 3D structure is exposed.
    Type: Application
    Filed: September 5, 2003
    Publication date: May 6, 2004
    Inventors: Axel Brintzinger, Ingo Uhlendorf, Andre Schenk, Alexander Wollanke
  • Patent number: 6665641
    Abstract: A high quality speech synthesizer in various embodiments concatenates speech waveforms referenced by a large speech database. Speech quality is further improved by speech unit selection and concatenation smoothing.
    Type: Grant
    Filed: November 12, 1999
    Date of Patent: December 16, 2003
    Assignee: ScanSoft, Inc.
    Inventors: Geert Coorman, Filip Deprez, Mario De Bock, Justin Fackrell, Steven Leys, Peter Rutten, Jan DeMoortel, Andre Schenk, Bert Van Coile