Patents by Inventor Andrea ALBERTI

Andrea ALBERTI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS
    Publication number: 20230245854
    Abstract: A dielectric window assembly for a substrate processing system includes a dielectric window, a Faraday shield that is one of adjacent to the dielectric window, embedded within the dielectric window, and arranged in a recess in an upper surface of the dielectric window, and cooling channels arranged within the Faraday shield. The cooling channels are configured to flow coolant throughout the Faraday shield.
    Type: Application
    Filed: February 7, 2022
    Publication date: August 3, 2023
    Inventors: Andrea ALBERTI, Saravanapriyan SRIRAMAN, John DREWERY, Alexander Miller PATERSON