Abstract: The present invention provides a support material (137) used to support a substrate (150) during processing. The support material (137) comprises a non-woven material comprising a top region and a bottom region, wherein the top region (420) is less resilient than the bottom region (410). The non-woven material also has a first surface (141A) adjacent to the top region, and a first end and a second end. In some embodiments, the bottom region comprises a synthetic fabric and the top region comprises a polymeric material. Other embodiments of the invention include an apparatus and methods for processing substrates in a screen printing chamber that can deliver a repeatable and accurate screen printed pattern on one or more processed substrates using a non- woven support material. In one embodiment, the screen printing chamber is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material.

Abstract: A positioning device to position one or more plates of electronic circuits with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame, which is mounted removably on the rotary member, and a strip of transpirant material on which each plate is rested. The strip is wound between a pair of winding/unwinding rollers, pivoted on the frame. The positioning member also comprises heating means able to heat the wafer to take it to a determinate operating temperature.

Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.

Abstract: Embodiments of the present invention generally provide a cluster tool 10 that can be used to form electronic circuits on a substrate in an automated fashion. In one embodiment, the cluster tool 10 is adapted to process portions of a substrate to form part of a photovoltaic cell or a green-tape type circuit device in an automated fashion using a system controller 101. In one embodiment, the cluster tool 10 having plurality of work stations that comprise at least one station to deposit a layer on a substrate, a drying oven to dry the substrates, a testing station to test the substrates, and a storage station to store the substrates, and a transport element that is positionable in each of the work stations. A guide defines a substantially closed circuit along which a plurality of transport elements are able to be moved, on each of which at least one of the substrates is disposed.

Abstract: A testing device to test a plate for electronic circuits, comprising transport members able to transport the plate along an axis of feed (Y), at least from an entrance station to a testing station defining a testing plane (P?), and testing members, disposed in correspondence with the testing station. The testing device also comprises an alignment station defining an alignment plane (P), disposed upstream of the testing station, and alignment members, disposed in correspondence with the alignment station, able to dispose the plate in an aligned position, in which the plate is disposed symmetrical both with respect to the axis of feed (Y) and also with respect to a first axis (X) substantially transverse and co-planar to the axis of feed (Y).

Abstract: Embodiments of the present invention provide an end effector for a substrate handling robot. In one embodiment, the end effector comprises one or more Bernoulli chucks surrounded by a plurality of suction cup devices. In one embodiment, the suction cup devices are configured in the form of a bellows to provide both cushioning and lateral stability to the substrate. In one embodiment, the suction cup devices further include an air pressure device to provide light positive pressure to the substrate during release. Embodiments of the end effector described herein provide a small vacuum pressure over a large area of ultra-thin substrates to minimize damage during handling.

Abstract: Positioning device to position electronic circuit boards with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame which is mounted removably on the rotary member, and a strip made of transpirant material on which each board is rested, wherein the strip is wound between a pair of winding/unwinding rollers pivoted on the frame.

Abstract: The present invention(s) provide an apparatus and method for processing substrates in a screen printing chamber that can deliver a repeatable and accurate screen printed pattern on one or more processed substrates. In one embodiment, the screen printing chamber is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material. In one embodiment, the screen printing chamber is a processing chamber positioned within the Rotary line tool or Softline™ tool available from Baccini S.p.A., which is owned by Applied Materials, Inc. of Santa Clara, Calif.

Abstract: The present invention(s) provide an apparatus and method for efficiently drying material deposited on a substrate surface. The apparatus and methods described herein may be useful for removing a solvent type material from a material deposited on a surface of a substrate. In some cases the material may be deposited using a screen printing process. In one embodiment, a screen printing chamber is adapted to deposit a patterned material on a crystalline silicon substrate and then dry the deposited material in a drying chamber. In one embodiment, the screen printing chamber and the drying chamber are both positioned within the Rotary line tool or the Softline™ tool available from Baccini S.p.A., which is owned by Applied Materials, Inc. of Santa Clara, Calif.

Abstract: The present invention(s) provide an apparatus and method for efficiently drying material deposited on a substrate surface. The apparatus and methods described herein may be useful for removing a solvent type material from a material deposited on a surface of a substrate. In some cases the material may be deposited using a screen printing process. In one embodiment, a screen printing chamber is adapted to deposit a patterned material on a crystalline silicon substrate and then dry the deposited material in a drying chamber. In one embodiment, the screen printing chamber and the drying chamber are both positioned within the Rotary line tool or the Softline™ tool available from Baccini S.p.A., which is owned by Applied Materials, Inc. of Santa Clara, Calif.

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Abstract: A positioning device to position one or more plates of electronic circuits with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame, which is mounted removably on the rotary member, and a strip of transpirant material on which each plate is rested. The strip is wound between a pair of winding/unwinding rollers, pivoted on the frame. The positioning member also comprises heating means able to heat the wafer to take it to a determinate operating temperature.

Abstract: A method for the production and control of plates for electronics comprising a first step in which a plate is positioned, by means of positioning means, in a loading station; a second step in which the plate is disposed in a deposition station associated with a unit for depositing metal, or other material, in which the metal is deposited on the plate, in order to generate on the plates metal tracks, according to a pre-determined and desired topological disposition; a third step in which the plate is disposed in an exit station and a detection means is activated so as to detect the presence of defects in the plate; and a fourth step in which the plate is discharged from the exit station. In the first step the detection means is activated to identify defects in the plate disposed in the loading station. In the second step the deposition unit is activated in order to deposit the metal on the plate when in the first step the detection means has not detected any defect in the plate.

Abstract: A container for storing plates for electronic circuits, able to be used in an automatic store, comprises a supporting base provided with a first face defining a supporting plane and a second face defining a storage plane. The container has at least a portion of wall, disposed in correspondence with one side of the supporting base, converging in a first corner of the supporting base and cooperating with holding elements present in an adjacent side and defining respectively a first abutment plane and a second abutment plane substantially orthogonal with each other and with the supporting plane.

Abstract: A device to check and correct the position of plates for electronics, associated with a loading station of the plates and with a printing unit of an apparatus for depositing metal or other material, in which there is a video acquisition member to acquire at least an image indicating a position occupied by the plate in the loading station. The device comprises movement and positioning means suitable for the reciprocal alignment of the printing unit and the plate, as detected in the loading station, there also being present a control, processing and governing unit.

Abstract: A drying apparatus for silicon or alumina-based plate elements, such as the type for electronics, or other types of plates for electronics, comprises an oven that develops along a path and having a drying chamber that develops along the path, on a relative lying plane. The oven has an entrance (21) into the chamber and an exit from the chamber. The plate elements are fed into the chamber from the entrance to the exit along the path by means of a translation unit in order to effect a drying cycle. The translation unit comprises planar support elements able to advance along the chamber, which are disposed along the path and orthogonally thereto and inclined downwards with respect to the lying plane of the chamber by a relative angle. The plate elements are disposed on the planar support elements so as to define, during normal use, a passage way for the drying air, also below the plate elements.

Abstract: A cleaning device for cleaning a silk-screen printing station able to effect a silk-screen print, by means of a print paste, of impressions on silicon or alumina-based plate elements, such as of the type for electronics, or other types of plate for electronics, and comprising a net with incisions coherent with the impressions to be printed, through which the silk-screen print of the print paste is effected on the plate elements, comprises removal means able to be positioned below the net so as to selectively remove the excess print paste from the net. The removal means comprises at least a strip provided with at least an adhesive layer, the strip is associated with unwinding means so as to unwind it in a controlled manner, and with means able to take the adhesive layer into contact, selectively, with at least part of the lower surface of the net.

Abstract: An automatic store and a method for storing plates of electronic circuits comprising a feed belt that feeds the plates of electronic circuits along a first plane (F); collection boxes positioned along at least one side of the feed belt and in which the plates of electronic circuits fed by the feed belt are grouped together according to quality classes; and one or more clearing stations disposed in cooperation with the feed belt in order to position the plates of electronic circuits in the respective collection boxes. The store comprises at least two rows of collection boxes disposed along at least one side of the feed belt, and a movement unit associated with the collection boxes to discharge the filled collection boxes and to position new collection boxes to be filled.

Abstract: A testing device to test a plate for electronic circuits, comprising transport members able to transport the plate along an axis of feed (Y), at least from an entrance station to a testing station defining a testing plane (P?), and testing members, disposed in correspondence with the testing station. The testing device also comprises an alignment station defining an alignment plane (P), disposed upstream of the testing station, and alignment members, disposed in correspondence with the alignment station, able to dispose the plate in an aligned position, in which the plate is disposed symmetrical both with respect to the axis of feed (Y) and also with respect to a first axis (X) substantially transverse and co-planar to the axis of feed (Y).

Abstract: An alignment device to align a plate for electronic circuits comprises transport members able to transport the plate along a transport axis, at least from an entrance position to an alignment position defining an alignment plane. The device also comprises mobile members provided with: first movement members able to move the mobile members in a first direction directed along a first axis substantially perpendicular to the alignment plane so as to associate the mobile members with the plate; second movement members able to rotate the plate, associated with the mobile members, around the first axis; and at least third movement members able to move the plate, associated with the mobile members, in a second direction, directed along a second axis substantially transverse to the first axis and substantially co-planar with the transport axis.