Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.

Abstract: The invention relates to a process for the selective hydrogenation of alkynes and dienes in C2-C5+-olefin mixtures,—in C2- or C3-streams of the olefin preparation by cracking. The method comprises conducting the hydrogenation in the presence of a catalyst particle comprising (a) a metal of the tenth group of the Periodic Table, (b) a metal of the eleventh group of the Periodic Table and (c) optionally a compound of a metal of the first or second group of the Periodic Table. Components (a) and (b), and optionally (c), are applied to a support selected from the group consisting of silica, titanium dioxide, zirconium oxides, spinels, zinc aluminates, zinc titanate, aluminosilicates and mixtures thereof. The metal of the eleventh group is distributed homogeneously over the cross-section of the catalyst particle, and the metal of the tenth group is present in an edge layer close to the surface of the catalyst particle.

Abstract: In a device for the purification of exhaust gases, especially exhaust gases consisting of fluorine-containing compounds, bore holes (7,8) are made in a ring burner (5) for the separate supply of combustion gas and oxygen on a single hole circle around a central exhaust gas supply (9). The ring burner is arranged in a combustion chamber (1). The combustion chamber is closed up to an annular gap (20) between a cylindrical jacket (4) and a front face (16). Additional oxygen or additional air is introduced into the annular gap (20).

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay.

Abstract: A catalyst for the selective hydrogenation of alkynes and dienes in C2-C5+-olefin mixtures is described. These catalysts contain (a) a metal of the tenth group of the Periodic Table, (b) a metal of the eleventh group of the Periodic Table and (c) if required, a compound of a metal of the first or second group of the Periodic Table, these metals being applied to a support which is selected from the group consisting of silica, titanium dioxide, zirconium oxides, spinels, zinc aluminates, zinc titanates or mixtures of these substances, and the metal of the eleventh group being distributed homogeneously over the cross section of the catalyst particle and the metal of the tenth group being present in the edge layer close to the surface of the catalyst particle. Such a catalyst is prepared by applying the metal of the eleventh group, preferably during the preparation of the support itself, by impregnation with a solution of a suitable metal salt.

Abstract: A catalyst for the selective hydrogenation of alkynes and dienes in C2-C5+-olefin mixtures is described. These catalysts contain (a) a metal of the tenth group of the Periodic Table, (b) a metal of the eleventh group of the Periodic Table and (c) if required, a compound of a metal of the first or second group of the Periodic Table, these metals being applied to a support which is selected from the group consisting of silica, titanium dioxide, zirconium oxides, spinels, zinc aluminates, zinc titanates or mixtures of these substances, and the metal of the eleventh group being distributed homogeneously over the cross section of the catalyst particle and the metal of the tenth group being present in the edge layer close to the surface of the catalyst particle. Such a catalyst is prepared by applying the metal of the eleventh group, preferably during the preparation of the support itself, by impregnation with a solution of a suitable metal salt.

Abstract: Exhaust gases from CVD and plasma processes contain toxic pollutants, particularly fluorine-containing compounds, and must therefore be purified. In a device for the purification of exhaust gases, frequently one comprising a combustion chamber and a fuel gas flame, the pollutants are converted by means of a thermally activated, chemical reaction. A special design of the combustion chamber and the burner improves the economy of the exhaust gas purification process and, above all, reduces the amount of nitrogen oxide contained in the purified exhaust gas. To this end, it is ensured that a flame having a reducing effect over its entire cross section forms in the burner by separately supplying fuel gas and oxygen in an alternate manner into drill holes arranged on a single hole circle and by sealing the combustion chamber such that no additional air is supplied to the vicinity of the burner.

Abstract: The invention relates to an apparatus and a process for the separation of particles from thermally after-treated process offgases which are obtained, in particular, in the surface modification of various substrates in vacuum units. The invention provides, in accordance with its object, an inexpensive and effective way of carrying out the separation of very small solid particles present in thermally after-treated process offgases. The apparatus of the invention is configured so that the process offgases which have been thermally after-treated in combustion chambers are conveyed via a cooler through an agglomeration stage and solid particles present in the after-treated process offgas can be separated off in a scrubbing stage.

Abstract: The invention relates to a modular system for the treatment of process exhaust gases containing pollutants. The object is to propose a possible way of carrying out the aftertreatment of process exhaust gases of this type which allows reliable operation at low cost. The intention is to allow sufficient redundancy and also flexible adaptation to increasing capacities to undergo aftertreatment. The modular system according to the invention is in this case designed in such a way that there is an electronic control for burners, the supply of process exhaust gases, washing liquid and/or of fuel gases in reaction chambers. At least two reaction chambers form modules which can be controlled by means of the electronic control for simultaneous or alternating treatment of process exhaust gases, taking account of detected operating states at the system or at least one module.

Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used in particular for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay. In a combustion chamber of the apparatus according to the invention, at least one burner with a process exhaust gas feed is arranged at the top cover of the combustion chamber. Furthermore, there is a feed for washing liquid, which forms a film for the removal of particles on the inner wall of the combustion chamber, and a discharge for exhaust gas and washing liquid arranged at the base.

Abstract: Alkynes, dienes, alkenynes and/or polyenes in an olefin-containing hydrocarbon stream are selectively hydrogenated catalytically in the gas phase in at least two reaction zones connected in series without introduction of part of this hydrocarbon stream between the penultimate reaction zone and the last reaction zone, wherein the hydrogen content in the reaction gas mixture upstream of the penultimate reaction zone and the degree of conversion in the penultimate reaction zone are set so that the reaction gas mixture contains at least 0.7% by volume of hydrogen at the outlet of the penultimate reaction zone.

Abstract: In a coated catalyst having a core and at least one shell surrounding the core, the core is made up of an inert support material, the shell or shells is/are made up of a porous support substance, with the shell being attached physically to the core, and a catalytically active metal selected from the group consisting of the metals of the 10th and 11th groups of the Periodic Table of the Elements is present in finely divided form or a precursor of the catalytically active metal is present in uniformly distributed form in the shell or shells.

Abstract: A catalyst for the selective hydrogenation of alkynes and dienes in C2-C5+-olefin mixtures is described.

Abstract: A catalyst comprising at least one metal of the 10th group of the Periodic Table of the Elements and at least one metal of the 11th group of the Periodic Table of the Elements on an aluminum oxide support, wherein the metal or metals of the 10th group is or are essentially concentrated in an outer layer close to the surface of the catalyst particle, the metal or metals of the 11th group is or are distributed essentially uniformly over the volume of the catalyst particle and the weight ratio of the metal or metals of the 11th group to the metal or metals of the 10th group is not more than 1.95.

Abstract: A process is provided for the selective hydrogenation of at least one organic compound having at least one unsaturated group, by bringing the at least one organic compound into contact with a hydrogen-containing gas in the presence of a catalyst, wherein the catalyst comprises an active material which is applied to a solid electrolyte to which, in turn, a metallic substrate is connected in such a way that a current flows through the solid electrolyte, so that the active material can be kept at a constant potential and a voltage is applied to