Patents by Inventor Andrea M. Mendoza

Andrea M. Mendoza has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integration of CVD tantalum oxide with titanium nitride and tantalum nitride to form MIM capacitors
    Patent number: 6573150
    Abstract: The present invention provides a method of integrating tantalum oxide into an MIM capacitor for a semiconductor device, comprising the step of vapor-depositing the tantalum oxide from an oxygen-free liquid precursor and under process conditions comprising a deposition temperature of less than about 500° C. and a deposition pressure of less than about 96 Torr, wherein the tantalum oxide is integrated into the MIM capacitor. Also provided is a method of forming an MIM capacitor comprising the step of integrating a tantalum oxide dielectric film with a tantalum nitride or a titanium nitride bottom electrode deposited on a substrate and a titanium nitride top electrode thereby forming an MIM capacitor.
    Type: Grant
    Filed: October 10, 2000
    Date of Patent: June 3, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Randall S. Urdahl, Pravin K. Narwankar, Shankarrram A. Athreya, Asher K. Sinensky, Andrea M. Mendoza