Abstract: A microfluidic chip having integrated heaters and a method for manufacturing the microfluidic chip is provided. Specifically, the microfluidic chip comprises a first substrate having a microchannel formed therein. The second substrate is bonded to the first substrate to encapsulate the microchannel. An integrated heating element, that is hermetically sealed and electrically isolated from the microchannel, is formed on the top surface the second substrate after the first and second substrates are bonded together. A biological reaction can be performed in the microchannel of the microfluidic chip while the fluid in the microchannel is heated by electrical current passing through the integrated heating element.

Abstract: Methods and designs for providing reduced sensitivity to mirror tilt in Fourier transform spectrometers are disclosed. According to an embodiment for two-directional tilt compensation, the FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a corner-cube retroreflector positioned to receive the first sub-beam from the beam splitter, a dual reflective mirror positioned to receive the first sub-beam from the corner-cube retroreflector at one surface and the second sub-beam at the other surface. An optical path delay can be created using a set of mirrors, tilting the beam splitter and/or a glass cube.

Abstract: A MEMS-based Fourier Transform (FT) spectrometer is provided. According to an embodiment, the MEMS-based FT spectrometer is an FT infrared (FTIR) spectrometer. The FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a fixed mirror positioned to receive the first sub-beam from the beam splitter, a scanning MEMS mirror positioned to receive the second sub-beam from the beam splitter, and a photodetector, wherein a reflected first sub-beam from the fixed mirror and a reflected second sub-beam from the scanning MEMS mirror recombine at the beam splitter and become directed to the photodetector. According to one embodiment, the photodetector is a MEMS-based IR detector. In addition, the MEMS-based IR detector can be an un-cooled IR detector having a capacitive sensing structure.

Abstract: A high-fill-factor and large-aperture tip-tilt micromirror array is disclosed. Electrothermal actuation can be used to obtain a large scan range, and the actuation engine can be hidden underneath the mirror plate for high fill factor. In one embodiment, inverted-series-connected (ISC) bimorph actuators can be used to achieve tilt and piston scanning. Embodiments can be used to implement optical phased array technology for steering active and passive electro-optical systems based on MEMS mirrors.