Abstract: An impedance matching network for plasma processes includes an input port being connectable to a radio frequency (RF) generator circuit, an output port being connectable to a load, and a transmission circuit. The transmission circuit connects the output port to the input port. The transmission circuit includes a first transmission line and a second transmission line, wherein the first transmission line is electrically connected to the input port, and wherein the second transmission line is electrically connected to the output port. The impedance matching network further includes a first impedance matching circuit configured to connect at least one reactance to the transmission circuit. The impedance matching network further includes a coupling element, wherein the first transmission line and the second transmission line are coupled to each other by the coupling element, and wherein the coupling element provides an inductive coupling between the first transmission line and the second transmission line.

Abstract: The invention relates to a broadband high power amplifier that comprises a signal input adapted to receive an input signal, at least one amplifier stage adapted to amplify the received input signal, a signal output adapted to output the signal amplified by the at least one amplifier stage as an output signal, a monitoring unit adapted to monitor signal characteristics of the input signal and the output signal and a control unit adapted to operate the at least one amplifier stage at an optimal operating point depending on the current signal characteristics monitored by said monitoring unit.

Abstract: The invention relates to a broadband high power amplifier that comprises a signal input adapted to receive an input signal, at least one amplifier stage adapted to amplify the received input signal, a signal output adapted to output the signal amplified by the at least one amplifier stage as an output signal, a monitoring unit adapted to monitor signal characteristics of the input signal and the output signal and a control unit adapted to operate the at least one amplifier stage at an optimal operating point depending on the current signal characteristics monitored by said monitoring unit.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: The present invention provides an amplifier circuit for amplifying an incoming signal, the amplifier circuit comprising at least two signal paths configured to amplify signals of different overlapping frequency bands, a signal splitter comprising an input port configured to receive the incoming signal, the signal splitter being coupled to an input side of the signal paths and configured to split the incoming signal into split signals for the signal paths, and a diplexer coupled to an output side of the signal paths and configured to combine the amplified signals and provide a combined amplified signal. Further, the present invention provides a respective method.

Abstract: A directional coupler is configured to provide a forward and/or a backward signal derived from a high-frequency signal. The directional coupler comprises a coupling element coupled to a main line, wherein the main line is configured to transport the high frequency signal. The directional coupler further comprises a signal line connecting the coupling element to a measuring port. The signal line comprises a defected ground structure inserted between the coupling element and the measuring port.

Abstract: A directional coupler is configured to provide a forward and/or a backward signal derived from a high-frequency signal. The directional coupler comprises a coupling element coupled to a main line, wherein the main line is configured to transport the high frequency signal. The directional coupler further comprises a signal line connecting the coupling element to a measuring port. The signal line comprises a defected ground structure inserted between the coupling element and the measuring port.