Patents by Inventor Andreas Beljakov

Andreas Beljakov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS
    Publication number: 20240085800
    Abstract: A component for a projection exposure apparatus for semiconductor lithography, comprises an optical element and an actuator, which are force-fittingly connected to each other. The actuator at least locally deforms the optical element. The actuator can be configured to minimize the loss in rigidity at the peripheries delimiting the actuator on the imaging quality. A method for designing a component of projection exposure apparatus is provided.
    Type: Application
    Filed: November 13, 2023
    Publication date: March 14, 2024
    Inventors: Thilo Pollak, Dietmar Duerr, Irina Schrezenmeier, Joerg Tschischgale, Matthias Manger, Andreas Beljakov, Stefan Baueregger, Alexander Ostendorf, Dieter Bader, Markus Raab, Bastian Keller