Patents by Inventor Andreas Benez

Andreas Benez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron beam device
    Patent number: 5422486
    Abstract: The invention relates to a scanning electron beam device in which at least one electrostatic reflector is provided for reflection of a secondary electron beam emitted by the primary electron beam on the object. This reflector is preferably located outside the beam path of the primary electron beam, and at least one electron-optical element which effects a preliminary deflection of the secondary electron beam by a small angle with respect to the beam path of the primary electron beam is provided between the object and the reflector. Such an arrangement makes it possible with comparatively low technical expenditure to reflect the secondary electron beam by a relatively large angle with respect to the unaffected primary electron beam which travels on a straight axis.
    Type: Grant
    Filed: May 7, 1993
    Date of Patent: June 6, 1995
    Assignee: ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruftechnik MbH
    Inventors: Karl H. Herrmann, Steffen Beck, Hans P. Feuerbaum, Jurgen Frosien, Andreas Benez, Stefan Lanio, Gerold Schonecker