Patents by Inventor Andreas Birkner
Andreas Birkner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230395417Abstract: The present disclosure relates to a device and to a method for imaging an object in at least two views. The device and the method can be used, for example, for teaching-in or monitoring a robot or for monitoring handling systems or, more generally, with devices which require imaging of an object for an analysis or a monitoring process. The device allows an object to be imaged in at least two different views simultaneously, comprising at least one imaging optical element and at least one reflective element, wherein the reflective element is at least partly arranged within object space of the imaging optical element, optical axis of the imaging optical element being associated with first view of the object, and wherein the reflective element is operable to image a second view of the object, which is different from the first view.Type: ApplicationFiled: October 19, 2021Publication date: December 7, 2023Inventors: Andreas Birkner, Ralf Langenbach
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Publication number: 20210352835Abstract: A method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine, wherein a computer-supported process is used to determine the presence and/or position and/or orientation of the substrate. Further, a system designed to execute the method. The computer-supported process includes an artificial neural network.Type: ApplicationFiled: May 3, 2021Publication date: November 11, 2021Inventor: Andreas BIRKNER
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Patent number: 10322919Abstract: A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.Type: GrantFiled: March 3, 2017Date of Patent: June 18, 2019Assignee: Integrated Dynamics Engineering GmbHInventors: Andreas Birkner, Simon Schadt, Arndt Evers
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Publication number: 20180155126Abstract: The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.Type: ApplicationFiled: March 9, 2016Publication date: June 7, 2018Applicant: Integrated Dynamics Engineering GmbHInventors: Ingo WEISKE, Arndt EVERS, Han HARTGERS, Andreas BIRKNER, Guido VAN LOON
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Publication number: 20170267504Abstract: A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.Type: ApplicationFiled: March 3, 2017Publication date: September 21, 2017Inventors: Andreas BIRKNER, Simon SCHADT, Arndt EVERS
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Publication number: 20130205822Abstract: The invention relates to a system for cooling a computing system, the computing system being cooled using at least two cooling circuits.Type: ApplicationFiled: February 10, 2011Publication date: August 15, 2013Inventors: Peter Heiland, Andreas Birkner
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Publication number: 20130050931Abstract: The invention relates to a system for cooling a computing system, wherein waste heat of the computing system is supplied as driving energy to a refrigeration machine for cooling the computing system.Type: ApplicationFiled: December 14, 2010Publication date: February 28, 2013Inventors: Peter Heiland, Andreas Birkner
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Patent number: 8089622Abstract: A device for evaluating defects in the edge area of a wafer (6) is disclosed. The evaluation may also be performed automatically. In particular, the device includes three cameras (25, 26, 27), each provided with an objective (30), wherein a first camera (25) is arranged such that the first camera (25) is opposite to an edge area on the upper surface (6a) of the wafer (6), wherein a second camera (26) is arranged such that the second camera (26) is opposite to a front surface (6b) of the wafer (6), and wherein a third camera (27) is arranged such that the third camera (27) is opposite to an edge area on the lower surface (6c) of the wafer (6).Type: GrantFiled: February 28, 2008Date of Patent: January 3, 2012Assignee: Vistec Semiconductor Systems GmbHInventors: Andreas Birkner, Michael Hofmann, Wolfgang Vollrath
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Publication number: 20080232672Abstract: A device for evaluating defects in the edge area of a wafer (6) is disclosed. The evaluation may also be performed automatically. In particular, the device includes three cameras (25, 26, 27), each provided with an objective (30), wherein a first camera (25) is arranged such that the first camera (25) is opposite to an edge area on the upper surface (6a) of the wafer (6), wherein a second camera (26) is arranged such that the second camera (26) is opposite to a front surface (6b) of the wafer (6), and wherein a third camera (27) is arranged such that the third camera (27) is opposite to an edge area on the lower surface (6c) of the wafer (6).Type: ApplicationFiled: February 28, 2008Publication date: September 25, 2008Applicant: VISTEC SEMICONDUCTOR SYSTEMS GMBHInventors: Andreas Birkner, Michael Hofmann, Wolfgang Vollrath
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Patent number: 7028565Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: February 2, 2004Date of Patent: April 18, 2006Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Patent number: 6962471Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: GrantFiled: June 14, 2001Date of Patent: November 8, 2005Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke
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Patent number: 6845174Abstract: An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprising a turntable (2) for rotating a substrate (S) placed thereon; an illumination source (4) and a receiving device (5) for evaluating the intensity of the light emerging from the illumination source (4), the edge zone of the substrate (S) placed on the turntable (2), upon rotation thereof, influencing the light intensity striking the receiving device (5); a device (6) for reading the identification marking (I), having a sensing region (E); and a calculation device that calculates a manipulated variable for a correction rotation angle about the rotation axis (A) for alignment of the identification marking (I) with respect to the sensing region (E), and a manipulated variable for a correction motion for changing the position of the sensing region (E) with respect to the rotation axis (A) or with respect to the actual position of the identification marking (I), and outputs them to a positioning deviType: GrantFiled: January 18, 2002Date of Patent: January 18, 2005Assignee: Leica Microsystems Jena GmbHInventors: Dominik Grau, Andreas Birkner, Knut Hiltawski, Frank Bernhardt
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Patent number: 6789436Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: March 6, 2003Date of Patent: September 14, 2004Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20040149055Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: February 2, 2004Publication date: August 5, 2004Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Patent number: 6736582Abstract: In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part.Type: GrantFiled: October 9, 2001Date of Patent: May 18, 2004Assignee: Brooks Automation, Inc.Inventors: Andreas Mages, Andreas Birkner, Alfred Schulz, Klaus Schultz
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Publication number: 20030140716Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: March 6, 2003Publication date: July 31, 2003Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Patent number: 6553850Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c ) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: GrantFiled: January 24, 2002Date of Patent: April 29, 2003Assignee: Leica Microsystems Jena GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20020095999Abstract: The invention relates to an arrangement for transporting and inspecting semiconductor substrates (6), having at least three workstations (8, 10, 12), a changer (14), which has at least three arms (14a, 14b, 14c) which are designed to load the individual workstations (8, 10, 12) with semiconductor substrates (6). A measuring device (15) is assigned to the second workstation (10), determines the deviation of the current position of the semiconductor substrate (6) and makes it available to the arrangement (3) for the further inspection of the semiconductor substrate (6). In addition, the changer (14) is not equipped with means for exact positioning of the semiconductor substrates (6) in the workstations (8, 10, 12).Type: ApplicationFiled: January 24, 2002Publication date: July 25, 2002Applicant: LEICA MICROSYSTEMS JENA GmbHInventors: Andreas Birkner, Frank Bernhardt, Knut Hiltawski
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Publication number: 20020097905Abstract: An arrangement for the identification of a substrate (S) having at least one identification marking (I), comprisingType: ApplicationFiled: January 18, 2002Publication date: July 25, 2002Applicant: Leica Microsystems Jena GmbHInventors: Dominik Grau, Andreas Birkner, Knut Hiltawski, Frank Bernhardt
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Publication number: 20020051698Abstract: The invention is based on a substrate conveying module (1) for conveying substrates into a workstation (3) for inspection, measurement, or processing of the substrates, in which on because of connecting elements (4a, b) in at least two side walls (1a, b, c) of the substrate conveying module (1) and/or in at least two side walls (3a, b, c, d) of the workstation (3), the substrate conveying module (1) can, at the installation location of the workstation (3), be flexibly connected thereto in different orientations with respect to the workstation (3) and/or can be coupled at different points to the workstation (3).Type: ApplicationFiled: June 14, 2001Publication date: May 2, 2002Inventors: Andreas Birkner, Knut Hiltawski, Karsten Urban, Joachim Wienecke