Patents by Inventor Andreas Ewald LOPP

Andreas Ewald LOPP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY
    Publication number: 20160276142
    Abstract: According to the present disclosure, a semiconductor substrate handling systems and substrate carrier is provided. The substrate carrier for holding a substrate to be processed and for transporting the substrate in or through a processing area with a transport device includes a main portion for holding the substrate; a first end portion adapted to be supported by the transport device; and at least one first intermediate portion connecting the main portion with the first end portion. The at least one first intermediate portion includes one or more cut-outs adapted to reduce thermal energy transfer between the main portion and the first end portion.
    Type: Application
    Filed: November 25, 2013
    Publication date: September 22, 2016
    Inventors: Andreas Ewald LOPP, Stefan KELLER, Uwe SCHÜßLER, Stefan BANGERT, Thomas GEBELE, Norbert SPATZ