Abstract: In order to provide a method of detaching a thin semiconductor circuit (1) from its base (2), wherein the semiconductor circuit (1) is provided with terminals (3) for electrical contacting, in particular with gold contacts, by means of which method thin semiconductor circuits (1) can also be mounted without damage for example directly on a chip card, it is proposed that a layer of soldering tin (6) is applied to a support substrate (4), the support substrate (4) is soldered to the electrical terminals (3) and the base (2) of the semiconductor circuit (1) is removed.

Abstract: In order to provide a method of detaching a thin semiconductor circuit (1) from its base (2), wherein the semiconductor circuit (1) is provided with terminals (3) for electrical contacting, in particular with gold contacts, by means of which method thin semiconductor circuits (1) can also be mounted without damage for example directly on a chip card, it is proposed that a layer of soldering tin (6) is applied to a support substrate (4), the support substrate (4) is soldered to the electrical terminals (3) and the base (2) of the semiconductor circuit (1) is removed.

Abstract: A flexible monolithic integrated circuit which is essentially formed from flexible circuit elements, connecting elements between the flexible circuit elements, and a flexible coating which comprises at least one layer of a coating material comprising a polymer, is suitable as a small and convenient integrated circuit for electronic devices on flexible data carriers for the logistic tracking of objects and persons. The invention also relates to a method of manufacturing a flexible integrated monolithic circuit whereby integrated monolithic circuit elements and connecting elements are formed in and on a semiconductor substrate, the main surface of the integrated circuit elements facing away from the semiconductor substrate are coated with a polymer resin, and the semiconductor substrate is removed. The method is based on conventional process steps in semiconductor technology and leads to a flexible integrated monolithic circuit in a small number of process steps.

Abstract: A flexible monolithic integrated circuit which is essentially formed from flexible circuit elements, connecting elements between the flexible circuit elements, and a flexible coating which comprises at least one layer of a coating material comprising a polymer, is suitable as a small and convenient integrated circuit for electronic devices on flexible data carriers for the logistic tracking of objects and persons.

Abstract: A support element of an automatic load platform of a silicon wafer exposure unit, having a circular cross-section, with a first outer diameter adapted to the guide of a load station, which diameter is smaller than that of a silicon wafer, wherein the circular disc of the support element has at its circumference in a direction parallel to the insertion direction of the load station at least partly enlarged portions and therewith a second outer diameter which corresponds approximately to that of the silicon wafer, and wherein the greatest width of the support element at right angles to the insertion direction corresponds to that of the circular disc.