Abstract: The present disclosure relates to a coldplate system. The coldplate system comprises at least one opening in a coldplate, and at least one heat sink is inserted through the at least one opening and is connected to the coldplate via resilient mounting means. In this regard, the at least one heat sink is provided with a heat transfer surface and an end with a heat dissipation structure. Furthermore, the heat dissipation structure is arranged within a space enclosed by the coldplate. Moreover, the resilient mounting means are configured to resiliently bias the heat transfer surface against a surface to be cooled when the coldplate system is mounted onto the surface.

Abstract: The present invention provides a PCB assembly. The PCB assembly comprises a PCB board element comprising an outer surface, and a micro heat pipe configured for heat transport. The micro heat pipe has a pipe wall and at least a section of the pipe wall is connected to the outer surface of the PCB board element in a thermally conductive manner. The thermally conductive connection may comprise a solder connection. Thus, a corresponding micro heat pipe may comprise a pipe wall, wherein at least a section of the pipe wall is configured to be soldered to a PCB element. Furthermore, the present invention provides a corresponding method of manufacturing a PCB assembly.

Abstract: The present invention provides a PCB assembly. The PCB assembly comprises a PCB board element comprising an outer surface, and a micro heat pipe configured for heat transport. The micro heat pipe has a pipe wall and at least a section of the pipe wall is connected to the outer surface of the PCB board element in a thermally conductive manner. The thermally conductive connection may comprise a solder connection. Thus, a corresponding micro heat pipe may comprise a pipe wall, wherein at least a section of the pipe wall is configured to be soldered to a PCB element. Furthermore, the present invention provides a corresponding method of manufacturing a PCB assembly.

Abstract: A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.

Abstract: A substrate transport system adapted for transporting a substrate moving in a substrate transport direction in a processing chamber is provided. The substrate transport system includes a plurality of transport rollers each having a transport shaft and a transport wheel. The transport shaft and the transport wheel are adapted for supporting the moving substrate. A heating means is arranged between the position of the moving substrate and the transport shaft and is adapted for heating the moving substrate.

Abstract: The present invention relates to a seal carrier plate and a system of interchangeable chambers. A seal carrier plate is provided, wherein the seal carrier plate is adapted for being located between a first chamber and a second chamber and adapted for sealing the first chamber with respect to the second chamber from the environment, and wherein the seal carrier plate comprises an opening for transferring of substrates from the first chamber to the second chamber. Further, a system of interchangeable chambers is provided, wherein the chambers are adapted for accommodating a seal carrier plate on at least one side of the chamber with an opening.

Abstract: A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

Abstract: The present invention generally comprises a physical vapor deposition (PVD) system having separate susceptor, cathode, and lid sections in which each section is on a rail that elevates the sections off the ground. The cathode section may comprise a plurality of rotatable cathodes that lie in a plane such that the axis of rotation for the rotary cathodes is perpendicular to the ground. The lid section and the cathode section may be moved on the rails to open the cathode section for servicing. Of the plurality of rotatable cathodes, the cathodes corresponding to the center of the substrate upon which material will be deposited are spaced a greater distance from the substrate than rotatable cathodes corresponding to the edge of the substrate.

Abstract: A sputter apparatus with a pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle. Methods for operating the sputter apparatus are also disclosed.

Abstract: A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.