Patents by Inventor Andreas GOEHLICH

Andreas GOEHLICH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9927316
    Abstract: A micro-electro-mechanical system (MEMS) chip for measuring a pressure in a pressure space includes a MEMS substrate having a measuring region, a contact-making region connected to the measuring region via lines and having contacts, and a bushing region disposed between the measuring region and the contact-making region. The MEMS substrate defines a cavity formed as a blind hole that defines an opening through one side of the MEMS substrate, the bottom of the blind hole forming a membrane. A measuring bridge includes piezoresistive elements disposed on that side of the membrane which faces away from the cavity's opening. A carrier substrate is disposed over the cavity's opening and bonded to the MEMS substrate in a two-dimensional manner to form a rod, with the result that the carrier substrate forms a bottom wall of the cavity spaced apart from the membrane.
    Type: Grant
    Filed: October 2, 2014
    Date of Patent: March 27, 2018
    Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNT E.V.
    Inventors: Stephane Kuehne, Claudio Cavalloni, Andreas Goehlich
  • Publication number: 20170113928
    Abstract: What is described is a method for producing a device having providing a substrate having an electrode which is exposed at a main side of the substrate. In addition, the method has forming a micro or nanostructure which has a spacer which is based on the electrode, wherein forming has the steps of: depositing a sacrificial layer on the main side, wherein the sacrificial layer has amorphous silicon or silicon dioxide; patterning a hole and/or trench into the sacrificial layer by means of a DRIE process; coating the sacrificial layer by means of ALD or MOCVD so that material of the nano or microstructure forms at the hole and/or trench, and removing the sacrificial layer.
    Type: Application
    Filed: January 6, 2017
    Publication date: April 27, 2017
    Inventors: Andreas GOEHLICH, Andreas JUPE, Holger VOGT
  • Patent number: 9337177
    Abstract: Embodiments of the present invention provide a method for manufacturing an integrated sensor structure. In one step, a semiconductor substrate having integrated readout electronics and a metallization structure is provided, the metallization structure including tungsten and being exposed on a surface of the semiconductor substrate. In another step, a sensor layer is deposited onto the surface of the semiconductor substrate, the semiconductor substrate having the integrated readout electronics and the metallization structure being exposed, when depositing the sensor layer, to a temperature which is above a maximum temperature used when generating the integrated readout electronics such that the sensor layer is connected to the integrated readout electronics via the metallization structure.
    Type: Grant
    Filed: February 22, 2013
    Date of Patent: May 10, 2016
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Holger Vogt, Andreas Goehlich, Andreas Jupe
  • Patent number: 9032797
    Abstract: A sensor device including a mechanical oscillator, an excitation unit which is configured to excite the mechanical oscillator to perform a mechanical oscillation within a non-linear range at a varying excitation frequency, and an evaluation unit configured to detect a jump, arising as a result of anharmonicity, in a resonance oscillation of the mechanical oscillation of the mechanical oscillator.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: May 19, 2015
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Andreas Goehlich, Hoc Khiem Trieu, Robert Klieber, Carole Jonville
  • Publication number: 20120210794
    Abstract: A sensor device including a mechanical oscillator, an excitation unit which is configured to excite the mechanical oscillator to perform a mechanical oscillation within a non-linear range at a varying excitation frequency, and an evaluation unit configured to detect a jump, arising as a result of anharmonicity, in a resonance oscillation of the mechanical oscillation of the mechanical oscillator.
    Type: Application
    Filed: February 10, 2012
    Publication date: August 23, 2012
    Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Andreas GOEHLICH, Hoc Khiem TRIEU, Robert KLIEBER, Carole JONVILLE