Patents by Inventor Andreas Hauke

Andreas Hauke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas driven rotating susceptor for rapid thermal processing (RTP) system
    Patent number: 6449428
    Abstract: Air bearings support a rotating wafer carrying base in an RTP system. The base in proximity to the air bearing is protected from warping due to absorption of radiation from the hot wafer being treated. The most preferred embodiment splits the base into an inner disk carrying the wafer and an outer ring, where the inner ring which absorbs the most energy contacts and is supported at three points by the outer disk which is supported by the air bearing.
    Type: Grant
    Filed: December 11, 1998
    Date of Patent: September 10, 2002
    Assignee: Mattson Technology Corp.
    Inventors: Helmut Aschner, Andreas Hauke, Karsten Weber, Dieter Zernickel
  • GAS DRIVEN ROTATING SUSCEPTOR FOR RAPID THERMAL PROCESSING (RTP) SYSTEM
    Publication number: 20010002948
    Abstract: An apparatus for preventing warping of a rotatable base for supporting an object being processed in a Rapid Thermal Processing (RTP) system due to non uniform heating of the base by radiation from the object being processed is disclosed.
    Type: Application
    Filed: December 11, 1998
    Publication date: June 7, 2001
    Applicant: Rodney T. Hodgson
    Inventors: HELMUT ASCHNER, ANDREAS HAUKE, KARSTEN WEBER, DIETER ZERNICKEL
  • Rapid thermal processing (RTP) system with gas driven rotating substrate
    Patent number: 6005226
    Abstract: An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.
    Type: Grant
    Filed: November 24, 1997
    Date of Patent: December 21, 1999
    Assignee: Steag-RTP Systems
    Inventors: Helmut Aschner, Andreas Hauke, Ulrich Walk, Dieter Zernickel