Patents by Inventor Andreas Hiermer

Andreas Hiermer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060163059
    Abstract: Sputtering cathode and method has a basic cathode body with cooling arrangement, and a cooling contact body disposed between the cooling arrangement and a target such that it is heat conducting, and wherein the contact face between the cooling contact body and the target is provided with a friction-reducing layer.
    Type: Application
    Filed: August 27, 2003
    Publication date: July 27, 2006
    Inventors: Klaus Leitner, Andreas Hiermer