Patents by Inventor Andreas Hiliger

Andreas Hiliger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method of manufacturing the same
    Publication number: 20050255663
    Abstract: A semiconductor device according to the present invention comprises a capacitor including a lower electrode, a dielectric material, and an upper electrode. The device further comprises a first protective film which contacts the upper electrode to constitute a columnar structure of films formed by a sputtering process and a second protective film formed above the first protective film by a CVD process.
    Type: Application
    Filed: June 1, 2004
    Publication date: November 17, 2005
    Inventors: Katsuaki Natori, Koji Yamakawa, Hiroyuki Kanaya, Karl Hornik, Andreas Hiliger