Abstract: Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.

Abstract: Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.

Abstract: A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

Abstract: Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor.

Abstract: Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.

Abstract: A double-action piston pump of an application system for applying a fluid medium to a substrate, wherein the piston pump has a piston which is movable between a first reversal point and a second reversal point for delivering the fluid medium, wherein on reaching the first reversal point and the second reversal point, the movement direction of the piston is reversed, wherein during an output period, the fluid medium is output by means of an output device, and during an interruption period, an output of the fluid medium by means of the output device is interrupted, wherein during the interruption period, the movement direction of the piston is reversed, wherein on reversal of the movement direction during the interruption period, the piston is situated at an intermediate position between the first reversal point and the second reversal point.

Abstract: Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.

Abstract: Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor.

Abstract: To recognize a fault in an arrangement including a transformer having a primary winding connected in series with a DC voltage line and a secondary winding coupled magnetically to the primary winding, and including an evaluation unit that processes a secondary signal on the secondary winding, a signal component at at least one frequency is determined from the secondary signal and a signal level of the signal component is compared with a signal threshold. The fault is detected when the signal level falls below the signal threshold.

Abstract: A method for operating a double-action piston pump of an application system for applying a fluid medium to a substrate, wherein the piston pump has a piston which is movable between a first reversal point and a second reversal point for delivering the fluid medium, wherein on reaching the first reversal point and the second reversal point, the movement direction of the piston is reversed, wherein during an output period, the fluid medium is output by means of an output device, and during an interruption period, an output of the fluid medium by means of the output device is interrupted, wherein during the interruption period, the movement direction of the piston is reversed, wherein on reversal of the movement direction during the interruption period, the piston is situated at an intermediate position between the first reversal point and the second reversal point.

Abstract: A method for operating a double-action piston pump of an application system for applying a fluid medium to a substrate, wherein the piston pump has a piston which is movable between a first reversal point and a second reversal point for delivering the fluid medium, wherein on reaching the first reversal point and the second reversal point, the movement direction of the piston is reversed, wherein during an output period, the fluid medium is output by means of an output device, and during an interruption period, an output of the fluid medium by means of the output device is interrupted, wherein during the interruption period, the movement direction of the piston is reversed, wherein on reversal of the movement direction during the interruption period, the piston is situated at an intermediate position between the first reversal point and the second reversal point.

Abstract: Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.

Abstract: Disclosed herein are system, method, and computer program product embodiments for displaying object pages containing data displayed in tables in a client application. The client application may provide a user experience framework via which an administrator may pre-configure the behavior of object pages that display data related to the application in table form. A table may be configured to display using lazy loading, tab navigation, or a preview version to list report based on the nature and expected size of the table. When preview version to list report is chosen, a preview version of a table may be provided to a user to allow the user to interact with the data without displaying the entirety of the dataset.

Abstract: Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor such that a pressure of the pressure medium can be measured.

Abstract: Disclosed is a vacuum valve with a sensor arrangement having at least one inertial sensor, where the sensor arrangement is designed in such a way it detects a measuring signal with respect to an acceleration impacting on the valve.

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: Disclosed is a pin lifting device which is designed for moving and positioning a substrate to be processed, in particular a wafer, in a process atmosphere region which can be provided by a vacuum process chamber. The pin lifting device includes a coupling designed to receive a support pin adapted to contact and support the substrate, and a drive unit designed and interacting with the coupling such that the coupling is linearly adjustable along an axis of adjustment from a lowered normal position to an extended support position and back. The pin lifting device has at least one sensor unit which is designed and arranged in such a way that force-dependent and/or acceleration-dependent condition information can be generated by means of the sensor unit with reference to at least part of the pin lifting device.

Abstract: Disclosed is a pin lifting device is designed for moving and positioning a substrate to be processed in a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin designed to contact and support the substrate, and further comprises a drive part having a drive unit adapted to cooperate with the coupling such that the coupling is linearly adjustable along an adjustment axis from a lowered normal position to an extended support position and back The pin lifting device has at least one temperature sensor, where the temperature sensor is designed and arranged such that a measurement signal representing thermal information with respect to at least part of the pin lifting device can be generated by means of the temperature sensor.

Abstract: To recognize a fault in an arrangement including a transformer having a primary winding connected in series with a DC voltage line and a secondary winding coupled magnetically to the primary winding, and including an evaluation unit that processes a secondary signal on the secondary winding, a signal component at at least one frequency is determined from the secondary signal and a signal level of the signal component is compared with a signal threshold. The fault is detected when the signal level falls below the signal threshold.

Abstract: Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.