Patents by Inventor Andreas KOENIGER

Andreas KOENIGER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POSITION OF A COMPONENT
    Publication number: 20210080244
    Abstract: A measuring assembly for the frequency-based determination of the position of a component, in particular in an optical system for microlithography, includes at least one optical resonator, which has a stationary first resonator mirror, a movable measurement target assigned to the component, and a stationary second resonator mirror. The second resonator mirror is formed by an inverting mirror (130, 330, 430, 530), which reflects back on itself a measurement beam coming from the measurement target.
    Type: Application
    Filed: November 24, 2020
    Publication date: March 18, 2021
    Inventors: Matthias MANGER, Andreas KOENIGER, Alexander VOGLER