Abstract: A method for producing a silicon anode for lithium batteries, wherein an active layer made of silicon is deposited onto a substrate, preferably copper, said active layer then being subjected to a rapid annealing process. The aim of the invention is to provide a method with which the stress in the deposited layers for producing a silicon anode for lithium batteries can be minimized and which can be easily integrated into an existing production process. This is achieved in that a substrate surface is structured by means of a process prior to applying the active layer, the substrate surface is modified in an unstructured state by means of a process, or the active layer is structured during the production thereof by means of photolithography and a subsequent physical deposition process, preferably sputtering or vapor deposition, and an annealing process, preferably a rapid annealing process, so as to form segments.

Abstract: The invention relates to a method for producing a silicon anode for lithium batteries, in which a silicon layer is deposited on a substrate, preferably copper, and is then subjected to short-term tempering. The object of the present invention is to provide a method which allows control of the proportions of silicon relative to silicide and metal, in which method a compromise should be found between the maximum proportion of pure silicon which must be available as active material for the intercalation of lithium, with at the same time a sufficient number of inactive regions to achieve stability and good electrical conductivity, and with a sufficient anode layer thickness with a high silicon content for a high capacitance. According to the invention, said object is achieved in a first approach by repeating the deposition of the silicon layer and the subsequent short-term tempering at least once.

Abstract: The invention relates to a method for producing a silicon electrode as an anode for a lithium-ion battery in which a silicon layer structure is applied to a carrier substrate. The problem addressed by the invention of specifying a method which is suitable for introducing additional lithium into the silicon electrode as an anode, in particular to compensate for initial losses during battery use and which is suitable for industrial use, is solved in that the silicon electrode is subjected to pre-lithiation in which lithium is introduced into the silicon layer structure through a process, in that a protective layer is applied and in that the introduced lithium is subjected, in a regulated and diffusion-controlled manner, through subsequent rapid annealing using a targeted application of energy, to a reaction with the silicon layer structure to produce lithium silicide.

Abstract: The invention relates to a method for increasing the adhesive strength of active layers in lithium batteries, in which a silicon layer is deposited on a substrate, preferably made of copper, and subsequently subjected to rapid annealing.