Patents by Inventor Andreas Luttinghaus-Henkel

Andreas Luttinghaus-Henkel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for plasma treating workpieces
    Publication number: 20050233077
    Abstract: Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows (55).
    Type: Application
    Filed: May 9, 2003
    Publication date: October 20, 2005
    Inventors: Michael Lizenberg, Frank Lewi, Hartwig Muller, Klaus Vogel, Gregor Arnold, Stephan Behle, Andreas Luttinghaus-Henkel, Matthias Bicker, Jurgen Klein, Marten Walther