Abstract: Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows (55).

Abstract: A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.

Abstract: The invention relates to an apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD. It is an object of the invention to ensure a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The invention in particular proposes a rotary apparatus which comprises a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.

Abstract: The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.

Abstract: A process for applying alternating layers by chemical vapor deposition comprises the process steps of depositing an adhesion-promoter layer on a substrate and applying a barrier layer. Alternating layers comprising organic and inorganic materials are deposited alternately, and in this process the coating time for application of the adhesion-promoter layer is between 0.05 s and 4.0 s and the coating time for application of the inorganic barrier layer is between 0.1 s and 6.0 s. A composite material is also produced using the process.

Abstract: In order to allow a continuous production process for the plasma treatment of workpieces, an apparatus for plasma treatment of workpieces is provided which comprises a transport device and a plasma generating device which injects electromagnetic energy into an area of the apparatus during operation, in which the transport device carries the workpieces through the area continuously.

Abstract: The invention relates to a fluid rotary leadthrough having a journal and a sleeve. The sleeve and the journal are sealed off with respect to one another. The journal and the sleeve each have a line connection. The line connections, at least from time to time, are connected to one another via a fluid passage so that a flow of fluid through the fluid rotary leadthrough is made possible. The journal is arranged rotatably in the sleeve.

Abstract: The invention relates to an apparatus for coating hollow bodies, e.g. plastic drinks bottles. It is an object of the invention to provide an apparatus for treating workpieces which operates reliably and with low maintenance, can be flexibly adapted to the user's requirements or to the requirements of the desired process sequence, and which allows efficient evacuation. The apparatus according to the invention comprises at least one treatment device (101) for receiving at least one workpiece, a rotor on which the treatment device is arranged, a fluid rotary leadthrough for feeding at least one fluid onto the rotor and/or for discharging at least one fluid from the rotor, the fluid rotary leadthrough having a journal and a sleeve, which at least in sections are sealed off from one another, and the journal being arranged rotatably in the sleeve. The proposed radial arrangement is particularly unsusceptible to faults and entails little maintenance.

Abstract: An apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD is provided. The method ensures a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The rotary apparatus includes a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.

Abstract: Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station (17), which can be at least partly evacuated, and at least one part (18) of the treatment station is moved relative to another part (27, 35) thereof in order to help manipulate the workpieces. The movement is carried out in such a way that a shell-shaped chamber wall (18) is positioned relative to a floor (35) of the chamber and relative to a chamber lid (27).

Abstract: A device for holding and vacuum-sealing a container as used in particular in the internal and/or external coating of containers. The device holds and vacuum-seals at least one container and has a sealing device for sealing the pouring opening in a defined end state also to comprise a holder with an introduction region, into which the wall region, which adjoins the pouring opening, together with the pouring opening, can be at least partially introduced, and a cage, which interacts with the holder and holds at least one clamping element in such a manner that, when force is applied to the cage in the direction in which the container is introduced into the defined end state, the clamping element can be guided out of a position in which it substantially releases the introduction region into a position in which it projects into the introduction region.

Abstract: A method and apparatus are provided for allowing effective and fast CVD coating of workpieces. The invention provides a rotary apparatus for treatment, in particular CVD-coating, which includes a conveyor carousel, treatment stations, which are transported by the conveyor carousel, and at least one first pump device. The first pump device is transported by the conveyor carousel.

Abstract: An apparatus and method for a vacuum coating of substrates is provided. The apparatus for vacuum coating of substrates includes a conveyor device, at least one coating station having a plurality of coating places, which is conveyed on the conveyor device, an evacuation device, as well as a device for rotating the coating places on the conveyor device.

Abstract: The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed arid rotating transport path.

Abstract: The invention describes a process for applying alternating layers by chemical vapor deposition which comprises the process steps of depositing an adhesion-promoter layer on a substrate and of applying a barrier layer, alternating layers comprising organic and inorganic materials being deposited alternately, in which process the coating time for application of the adhesion-promoter layer is between 0.05 s and 4.0 s and the coating time for application of the inorganic barrier layer is between 0.1 s and 6.0 s, and also a composite material produced using the process.

Abstract: The invention relates to an apparatus for coating hollow bodies, e.g. plastic drinks bottles. It is an object of the invention to provide an apparatus for treating workpieces which operates reliably and with low maintenance, can be flexibly adapted to the user's requirements or to the requirements of the desired process sequence, and which allows efficient evacuation. The apparatus according to the invention comprises at least one treatment device (101) for receiving at least one workpiece, a rotor on which the treatment device is arranged, a fluid rotary leadthrough for feeding at least one fluid onto the rotor and/or for discharging at least one fluid from the rotor, the fluid rotary leadthrough having a journal and a sleeve, which at least in sections are sealed off from one another, and the journal being arranged rotatably in the sleeve. The proposed radial arrangement is particularly unsusceptible to faults and entails little maintenance.

Abstract: To enable CVD coating with long coating times in an economical manner, the invention provides a CVD coating device, which comprises a conveyor, at least one coating station for coating workpieces, at least one evacuator and a device that generates a plasma in at least one subregion of the coating station, in which device at least two workpieces can be received in the at least one coating station.

Abstract: A device for holding and vacuum-sealing a container as used in particular in the internal and/or external coating of containers. The device holds and vacuum-seals at least one container and has a sealing device for sealing the pouring opening in a defined end state also to comprise a holder with an introduction region, into which the wall region, which adjoins the pouring opening, together with the pouring opening, can be at least partially introduced, and a cage, which interacts with the holder and holds at least one clamping element in such a manner that, when force is applied to the cage in the direction in which the container is introduced into the defined end state, the clamping element can be guided out of a position in which it substantially releases the introduction region into a position in which it projects into the introduction region.

Abstract: To make it easier to move workpieces into and out of reactors in order for them to be treated by CVD therein, the invention provides a device for the CVD treatment of workpieces which comprises a conveyor and at least one reactor secured to the conveyor, the device having at least one mechanical control cam and the reactor having an opening and closing device that is actuated by the at least one control cam.

Abstract: In order to allow a continuous production process for the plasma treatment of workpieces, an apparatus for plasma treatment of workpieces is provided which comprises a transport device and a plasma generating device which injects electromagnetic energy into an area of the apparatus during operation, in which the transport device carries the workpieces through the area continuously.